An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry

被引：3

作者：

Barison, S

Barreca, D

Daolio, S

Fabrizio, M

Tondello, E

机构：

[1] CNR, Ist Polarog & Elettrochim Preparat, I-35127 Padua, Italy

[2] Univ Padua, Dipartimento Chim Inorgan Metallorgan & Analit, Ctr Studio Stabil & Reattiv Composti Coordinaz, I-35131 Padua, Italy

来源：

RAPID COMMUNICATIONS IN MASS SPECTROMETRY | 2001年 / 15卷 / 17期

关键词：

D O I：

10.1002/rcm.397

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry (SIMS) is presented. The coatings, whose composition ranged between CoO and Co3O4, were synthesized by chemical vapor deposition (CVD) on indium tin oxide (ITO) substrates, using cobalt(II) beta -diketonate as precursor. The SIMS analysis revealed a satisfactory precursor conversion into the oxides and allowed distinction of regions in the films at different compositions. Film-substrate intermixing phenomena were evidenced and studied as a function of deposition temperature, film thickness and composition. Copyright (C) 2001 John Wiley & Sons, Ltd.

引用

页码：1621 / 1624

页数：4

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