0.532-μm laser conditioning of HfO2/SiO2 third harmonic separator fabricated by electron-beam evaporation

被引:0
|
作者
Li, Dawei [1 ,2 ]
Zhao, Yuan'an [1 ]
Shao, Jianda [1 ]
Fan, Zhengxiu [1 ]
He, Hongbo [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
关键词
D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The 0.532-mu m laser conditioning of HfO2/SiO2 third harmonic separator fabricated by electron-beam evaporation (EBE) was studied. The laser induced damage threshold (LIDT) of the separator determined by 1-on-1 test is 9.1 J/cm(2) and it is 15.2 J/cm(2) after laser conditioning determined by raster scanning. Two kinds of damage morphologies, taper pits and flat bottom pits, are found on the sample surface and they show different damage behaviors. The damage onset of taper pits does not change obviously and the laser conditioning effect is contributed to the flat bottom pits, which limits the application of laser conditioning.
引用
收藏
页码:386 / 387
页数:2
相关论文
共 50 条
  • [1] 0.532-μm laser conditioning of HfO2/SiO2 third harmonic separator fabricated by electron-beam evaporation
    李大伟
    赵元安
    邵建达
    范正修
    贺洪波
    ChineseOpticsLetters, 2008, (05) : 386 - 387
  • [2] 0.532-μm laser conditioning of HfO2/SiO2third harmonic separator fabricated by electron-beam evaporation
    Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
    不详
    Chin. Opt. Lett., 2008, 5 (386-387):
  • [3] Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248 nm prepared by electron-beam evaporation
    Yuan, Jingmei
    Yuan, Lei
    He, Hongbo
    Yi, Kui
    Fan, Zhengxiu
    Shao, Jianda
    APPLIED SURFACE SCIENCE, 2008, 254 (15) : 4864 - 4867
  • [4] HfO2/SiO2 chirped mirrors manufactured by electron beam evaporation
    Zhang Jinlong
    Cheng Xinbin
    Wang Zhanshan
    Jiao Hongfei
    Ding Tao
    APPLIED OPTICS, 2011, 50 (09) : C388 - C391
  • [5] Laser conditioning effect on HfO2/SiO2 film
    Wei, Yaowei
    Zhang, Zhe
    Liu, Hao
    Ouyang, Sheng
    Zheng, Yi
    Tang, Gengyu
    Chen, Songlin
    Ma, Ping
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2013, 25 (12): : 3338 - 3342
  • [6] Electrophysical characteristics of HfO2 gate structures formed by electron-beam evaporation
    Vasil'Ev A.G.
    Zakharov R.A.
    Orlikovskii A.A.
    Rogozhin A.E.
    Sonin M.S.
    Khorin I.A.
    Russ. Microelectr., 2009, 5 (327-333): : 327 - 333
  • [7] Effects of water adsorption on properties of electron-beam HfO2/SiO2 high-reflection coatings
    Zeng, Tingting
    Zhu, Meiping
    Chai, Yingjie
    Yin, Chaoyi
    Xu, Nuo
    Yi, Kui
    Wang, Yanzhi
    Zhao, Yuan'an
    Hu, Guohang
    Shao, Jianda
    THIN SOLID FILMS, 2020, 697 (697)
  • [8] Single-shot and inultishot laser induced damage of HfO2/SiO2 multilayer at YAG third harmonic
    Zhao, YN
    Tang, ZS
    Shao, JD
    Fan, ZX
    LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2003, 2003, 5273 : 23 - 29
  • [9] 1064 nm laser conditioning effect of HfO2/SiO2 high reflectors deposited by E-beam
    Liu, Xiaofeng
    Li, Dawei
    Li, Xiao
    Zhao, Yuan'an
    Shao, Jianda
    Zhongguo Jiguang/Chinese Journal of Lasers, 2009, 36 (06): : 1545 - 1549
  • [10] Modulation of electron transfer in Si/SiO2/HfO2/Graphene by the HfO2 thickness
    Ben Maad, Y.
    Durnez, A.
    Ajlani, H.
    Madouri, A.
    Oueslati, M.
    Meftah, A.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2020, 126 (09):