DETERMINATION OF PROXIMITY EFFECT FORWARD SCATTERING RANGE PARAMETER IN E-BEAM LITHOGRAPHY

被引：0
|
作者：
Urbanek, M. [1 ]
Kolarik, V. [1 ]
Kral, S. [1 ]
Dvorakova, M. [1 ]
机构：
[1] Vvi, Inst Sci Instruments AS CR, Brno 61264, Czech Republic
来源：
RECENT TRENDS IN CHARGED PARTICLE OPTICS AND SURFACE PHYSICS INSTRUMENTATION | 2010年
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D O I：
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中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：67 / 68
页数：2
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