共 9 条
[1]
CAPOTE AM, 1996, P NEPCON W 96 3, V3, P1753
[7]
Low resistivity LCVD direct write Cu conductor lines for IC customisation
[J].
PHYSICA SCRIPTA,
1997, T69
:237-241
[9]
Terrill RE, 1998, AEROSP CONF PROC, P377, DOI 10.1109/AERO.1998.686934