Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

被引:27
作者
Wood, Graham S. [1 ]
Zhao, Chun [1 ]
Pu, Suan Hui [1 ,2 ]
Boden, Stuart A. [1 ]
Sari, Ibrahim [1 ]
Kraft, Michael [3 ]
机构
[1] Univ Southampton, Sch Elect & Comp Sci, Nano Res Grp, Mountbatten Bldg,Highfield Campus, Southampton SO17 1BJ, Hants, England
[2] Univ Southampton, Malaysia Campus,3 Persiaran Canselor 1, Nusajaya 79200, Johor, Malaysia
[3] Univ Liege, Inst Montefiore, Bldg B28,Allee Decouverte 10, B-4000 Liege, Belgium
关键词
MEMS; Resonators; Mass sensing; Mode-localization;
D O I
10.1016/j.mee.2016.03.035
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The change in the mass, achieved with focused ion beam (FIB) milling, of one of a pair of electrostatically-coupled microelectromechanical systems (MEMS) resonators has been detected utilising the mode-localisation effect. It has been demonstrated that the shift in the amplitude ratio of the coupled-resonators at the in-phase mode frequency, in response to a mass change, is five orders of magnitude greater than the equivalent resonant frequency shift of a single resonator device. The device has been fabricated using a silicon-on-insulator (SOI) based process, which allows for high-yield and stiction-free fabrication. In addition, the design of the resonators has been created to have a larger surface area than previously reported designs, in order to facilitate future biological functionalisation. The mass sensitivity has been compared to current state-of-the-art mode-localised mass sensors and a 5.4 times increase in the amplitude ratio response to a given mass change has been demonstrated for the device in this work. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:169 / 173
页数:5
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