A passive wireless integrated humidity sensor

被引：10
|
作者：
Harpster, TJ [1 ]
Stark, B [1 ]
Najafi, K [1 ]
机构：
[1] Univ Michigan, Ctr Wireless Integrated Microsyst, Ann Arbor, MI 48109 USA
来源：
14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年
关键词：
D O I：
10.1109/MEMSYS.2001.906601
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a single-chip integrated humidity sensor (IHS) capable of wireless operation through inductive coupling with a remote transmitter. The 1.5x0.5x8mm(3) sensor chip consists of a planar electroplated copper coil (20 mum thick, 30 mum pitch, and 23 turns) and a silicon substrate separated by a 4100-5600 Angstrom polyimide film. The resonant frequency of the IHS changes with humidity and the measured sensitivity ranges from 4-16kHz/%RH. Measurements show a hysteresis of 4.5%RH over a range of 30-70%RH for a 5600 Angstrom -thick polyimide film IHS.
引用
收藏
页码：553 / 557
页数：3
相关论文
共 50 条
  • [1] A passive wireless integrated humidity sensor
    Harpster, TJ
    Stark, B
    Najafi, K
    SENSORS AND ACTUATORS A-PHYSICAL, 2002, 95 (2-3) : 100 - 107
  • [2] Integrated Passive and Wireless Sensor for Magnetic Fields, Temperature and Humidity
    Li, Bodong
    Yassine, Omar
    Kosel, Jurgen
    2013 IEEE SENSORS, 2013, : 45 - 48
  • [3] Passive wireless integrated humidity sensor based on dual-layer spiral inductors
    Zhang, Cong
    Guo, Li
    Wang, Li-Feng
    Huang, Jian-Qiu
    Huang, Qing-An
    ELECTRONICS LETTERS, 2014, 50 (18) : 1287 - 1288
  • [4] A Passive Wireless Integrated Humidity Sensor Based on Dual-layer Spiral Inductors
    Zhang, Cong
    Guo, Li
    Wang, Li-Feng
    Huang, Jian-Qiu
    Huang, Qing-An
    2014 IEEE SENSORS, 2014,
  • [5] A Semi Flexible Integrated Wireless Humidity Sensor
    Mahboob, Md. Rahat
    Islam, Tarikul
    Khan, Mohammad Ajmal
    2015 ANNUAL IEEE INDIA CONFERENCE (INDICON), 2015,
  • [6] A Novel Passive Wireless Sensor for Concrete Humidity Monitoring
    Zhou, Shuangxi
    Deng, Fangming
    Yu, Lehua
    Li, Bing
    Wu, Xiang
    Yin, Baiqiang
    SENSORS, 2016, 16 (09)
  • [7] Design of a Humidity Sensor Tag for Passive Wireless Applications
    Wu, Xiang
    Deng, Fangming
    Hao, Yong
    Fu, Zhihui
    Zhang, Lihua
    SENSORS, 2015, 15 (10) : 25564 - 25576
  • [8] 16-Sensor Passive Wireless SAW Humidity Sensor System
    Hines, J. H.
    Solie, L. P.
    Cote, G. O.
    Corey, J. D.
    Tucker, D. Y. G.
    Hines, A. T.
    Borguet, E. U.
    2012 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2012,
  • [9] A LC wireless passive temperature-pressure-humidity (TPH) sensor integrated on LTCC ceramic for harsh monitoring
    Tan, Qiulin
    Lv, Wen
    Ji, Yaohui
    Song, Ruijia
    Lu, Fei
    Dong, Helei
    Zhang, Wendong
    Xiong, Jijun
    SENSORS AND ACTUATORS B-CHEMICAL, 2018, 270 : 433 - 442
  • [10] High Sensitivity Passive Wireless Humidity Sensor Based on Polyvinyl Alcohol
    Wang, Bo
    Gao, Fei
    Li, Youwei
    Wang, Ke
    Cao, Shengli
    PROGRESS IN ELECTROMAGNETICS RESEARCH LETTERS, 2023, 111 : 93 - 102
12345