A Micromachined Vibrating Wheel Gyroscope with Folded Beams

被引：0

作者：

Zhao, Qiancheng ^{[1
]}

Lin, Longtao ^{[1
]}

Yang, Zhenchuan ^{[1
]}

Dong, Liguo ^{[1
]}

Yan, Guizhen ^{[1
]}

机构：

[1] Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Inst Microelect, Beijing 100871, Peoples R China

来源：

2013 IEEE SENSORS | 2013年

关键词：

DESIGN;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a micromachined vibrating wheel gyroscope with folded driving beams, which can improve the linearity and temperature stability of the gyroscope. The angular comb drives on the outer frame are used for large driving displacement, while the gap-changing comb capacitors on the inner frame are used for sensing the displacement with high sensitivity. The experimental results show that the scale factor and nonlinearity are 4.2 mV/degrees/s and 0.08% with the measurement range of +/- 500 degrees/s. The short term bias instability is evaluated to be about 34.1 degrees/h.

引用

页码：383 / 386

页数：4

共 8 条

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