Micromachined catalytic combustible hydrogen gas sensor

被引：123

作者：

Lee, Eui-Bok ^{[1
]}

Hwang, In-Sung ^{[2
]}

Cha, Jung-Ho ^{[3
]}

Lee, Ho-Jun ^{[3
]}

Lee, Won-Bae ^{[3
]}

Pak, James Jungho ^{[4
]}

Lee, Jong-Heun ^{[2
]}

Ju, Byeong-Kwon ^{[1
]}

机构：

[1] Korea Univ, Coll Engn, Sch Elect Engn, Display & Nanosyst Lab, Seoul 136713, South Korea

[2] Korea Univ, Dept Mat Sci & Engn, Seoul 136713, South Korea

[3] Seju Engn, Taejon 305801, South Korea

[4] Korea Univ, Coll Engn, Microelect & Micro Nano Syst Lab, Seoul 136713, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2011年 / 153卷 / 02期

关键词：

Catalytic combustion; MEMS; Hydrogen gas sensor; PELLISTOR ARRAY; FILMS;

D O I：

10.1016/j.snb.2010.11.004

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An integrated catalytic combustion H-2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm(2) and the catalytic combustion sensor showed high response to H-2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H-2 were 0.36 s and 1.29 s, respectively. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：392 / 397

页数：6

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