Characterization of the resolving power and contrast transfer function of a transmission X-ray microscope with partially coherent illumination

被引：49

作者：

Rehbein, Stefan ^{[1
]}

Guttmann, Peter ^{[1
]}

Werner, Stephan ^{[1
]}

Schneider, Gerd ^{[1
]}

机构：

[1] Helmholtz Zentrum Berlin Mat & Energie GmbH, Inst Soft Matter & Funct Mat, D-12489 Berlin, Germany

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 06期

关键词：

RESOLUTION;

D O I：

10.1364/OE.20.005830

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The achievable spatial resolution and the contrast transfer function (CTF) are key parameters characterizing an X-ray microscope. We measured the spatial resolution and the contrast transfer function of the transmission X-ray microscope (TXM) at the electron storage ring BESSY II. The TXM uses the radiation of an undulator source and operates under partially coherent illumination conditions. For spatial resolutions down to 25 nm, our measurements of the CTF's are in good agreement with theoretical CTF data for partial coherence. With higher resolution zone plate objectives, we measured a spatial resolution (half-pitch) of 11 nm in 1st and 3rd order of diffraction. However, with these objectives the stray light level increases significantly. (C) 2012 Optical Society of America

引用

页码：5830 / 5839

页数：10

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