S-transform application in phase extraction of spectrally resolved interferometry measuring step height

被引：8
作者：
Luo, Wentao [1 ,2 ]
He, Yu [1 ]
Tang, Yan [1 ]
Cheng, Xiaolong [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
来源：
APPLIED OPTICS | 2022年 / 61卷 / 03期
基金：
中国国家自然科学基金;
关键词：
WAVELET TRANSFORM; FOURIER-TRANSFORM; DISTANCE;
D O I：
10.1364/AO.447513
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Spectrally resolved interferometry is widely used in the measurement of distance, displacement, film thickness, and surface morphology in micro/nano-scale geometric measurement. The core of spectrally resolved white-light interferometry is phase extraction. Temporal phase shifting, Fourier transform, wavelet transform, and other methods are commonly used in phase extraction of spectrally resolved interferometry. The S-transform, providing frequency-dependent resolution and having good time-frequency characteristics, is widely used in power quality disturbance analysis, seismic wave analysis, and phase recovery in profilometry. S-transform is used to extract the phase of the spectrally resolved white-light interferometry signal measuring step height. Compared with Fourier transform and wavelet transform, it is proved that S-transform is a feasible method in phase extraction of spectrally resolved interferometry measuring step height. (C) 2022 Optica Publishing Group
引用
收藏
页码：737 / 743
页数：7
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