Optimization of the mechanical properties of magnetron sputtered diamond-like carbon coatings

被引：11

作者：

Sonderby, S. ^{[1
,2
,3
]}

Berthelsen, A. N. ^{[2
,3
]}

Almtoft, K. P. ^{[1
]}

Christensen, B. H. ^{[1
]}

Nielsen, L. P. ^{[1
]}

Bottiger, J. ^{[2
,3
]}

机构：

[1] Danish Technol Inst, Tribol Ctr, DK-8000 Aarhus C, Denmark

[2] Aarhus Univ, Interdisciplinary Nanosci Ctr iNANO, DK-8000 Aarhus C, Denmark

[3] Aarhus Univ, Dept Phys & Astron, DK-8000 Aarhus C, Denmark

来源：

关键词：

DLC; Annealing; Stress; Hardness; Nanoindentation; Raman spectroscopy; AMORPHOUS-CARBON; FILMS; HYDROGEN; BEHAVIOR;

D O I：

10.1016/j.diamond.2011.03.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon coatings containing hydrogen, a-C:H, were deposited by use of reactive DC magnetron sputtering with an industrial deposition system. The reactive gas C(2)H(2) was used in combination with carbon targets. Using Raman spectroscopy, nanoindentation and Rockwell C indentation, the mechanical properties of the coatings were optimized. Excessively high compressive stresses, which were measured with Raman spectroscopy, were found in the coatings with high hardness, resulting in poor adhesion to the substrates. By thermal annealing, these compressive stresses were reduced without altering the hardness, resulting in diamond-like carbon coatings with good adhesion. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：682 / 686

页数：5

共 18 条

[1] DLC based coatings prepared by reactive d.c. magnetron sputtering [J].

Bewilogua, K ;

Wittorf, R ;

Thomsen, H ;

Weber, M .

THIN SOLID FILMS, 2004, 447 :142-147

[2] Bonding in hydrogenated diamond-like carbon by Raman spectroscopy [J].

Casiraghi, C ;

Piazza, F ;

Ferrari, AC ;

Grambole, D ;

Robertson, J .

[3] Friction and wear behaviour of PVD chromium nitride supported carbon coatings [J].

Diesselberg, M ;

Stock, HR ;

Mayr, P .

SURFACE & COATINGS TECHNOLOGY, 2004, 188 :612-616

[4]

Donnet C., 2008, TRIBOLOGY DIAMOND LI

[5] Interpretation of Raman spectra of disordered and amorphous carbon [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107

[6] Diamond-like carbon: state of the art [J].

Grill, A .

[7] Formation and behavior of unbonded hydrogen in a-C:H of various compositions and densities [J].

Houska, J. ;

Klemberg-Sapieha, J. E. ;

Martinu, L. .

SURFACE & COATINGS TECHNOLOGY, 2009, 203 (24) :3770-3776

[8] Development of AFM tensile test technique for evaluating mechanical properties of sub-micron thick DLC films [J].

Isono, Y ;

Namazu, T ;

Terayama, N .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (01) :169-180

[9] Thermal stability of UBM sputtered DLC coatings with various hydrogen contents [J].

Ito, Hirotaka ;

Yamamoto, Kenji ;

Masuko, Masabumi .

THIN SOLID FILMS, 2008, 517 (03) :1115-1119

[10] Thermal expansion coefficient of hydrogenated amorphous carbon [J].

Marques, FC ;

Lacerda, RG ;

Champi, A ;

Stolojan, V ;

Cox, DC ;

Silva, SRP .

APPLIED PHYSICS LETTERS, 2003, 83 (15) :3099-3101

← 1 2 →