Soft magnetism and microwave magnetic properties of Fe-Co-Hf films deposited by composition gradient sputtering

被引：12

作者：

Li, Shandong ^{[1
,2
]}

Liu, Ming ^{[2
]}

Xu, Feng ^{[3
]}

Lou, J. ^{[2
]}

Tian, Zongjun ^{[4
]}

Wu, Jianpeng ^{[1
]}

Hu, Yi ^{[1
]}

Cai, Xinle ^{[1
]}

Duh, Jenq-Gong ^{[5
]}

Sun, Nian X. ^{[2
]}

机构：

[1] Fujian Normal Univ, Dept Phys, Fuzhou 350007, Peoples R China

[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA

[3] Nanjing Univ Sci & Technol, Dept Mat Sci & Technol, Nanjing 210094, Peoples R China

[4] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Nanjing 210016, Peoples R China

[5] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan

来源：

JOURNAL OF APPLIED PHYSICS | 2011年 / 109卷 / 07期

基金：

美国国家科学基金会;

关键词：

UNIAXIAL ANISOTROPY; HIGH PERMEABILITY; THIN-FILMS; FREQUENCY; GHZ;

D O I：

10.1063/1.3549584

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A composition gradient sputtering method was employed to deposit a series of (FexCo1-x)(1-y)Hf-y alloy films with different Fe/Co atomic ratios and Hf-doping. At Fe/Co = 70/30, the magnetically annealed (Fe0.7Co0.3)(1-y)Hf-y films with y = 0.087-0.124 showed a very high uniaxial anisotropy and an ultrahigh ferromagnetic resonance frequency over 7 GHz after the films were annealed at 350 degrees C, while at Fe/Co = 50/50, the as-deposited (Fe0.5Co0.5)(1-y)Hf-y films with y = 0.074-0.168 showed an excellent in-plane uniaxial anisotropy and high ferromagnetic resonance frequency over 3 GHz. These Fe-Co-Hf films deposited by the composition gradient sputtering method exhibited a high saturation magnetization of 1.8-2.2 T, a large uniaxial anisotropy field of 200-500 Oe, and a high ferromagnetic resonance frequency over 7 GHz, which provides great opportunities for integrated magnetic devices. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3549584]

引用

页数：3

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