Study on optimizing the performance of infrared detectors using material chip technology

被引:6
作者
Chen, GB
Lu, W
Chen, XS
Li, ZF
Cai, WY
He, L
Hui, XN
Li, YJ
Shen, SC
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat, Joint Open Lab Ion Beam, Shanghai 200050, Peoples R China
关键词
D O I
10.1088/0268-1242/18/9/313
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using material chip technology, large area n-on-p planar junctions with various boron implantation doses have been fabricated on an Hg1-xCdxTe (x = 0.291) film, similarly grown using molecular beam epitaxy, for the mid-infrared wavelength range. The current-voltage characteristics of p-n junctions have been measured on a cold stage at 77 K and an optimized ion implantation dose has been discovered. Zero bias resistance of all the junctions has been calculated and shows distinct dependence upon the boron implantation doses.
引用
收藏
页码:887 / 890
页数:4
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