Heterojunction oxide thin-film transistors with unprecedented electron mobility grown from solution

被引:177
作者
Faber, Hendrik [1 ,2 ]
Das, Satyajit [1 ,2 ]
Lin, Yen-Hung [1 ,2 ]
Pliatsikas, Nikos [3 ]
Zhao, Kui [4 ]
Kehagias, Thomas [3 ]
Dimitrakopulos, George [3 ]
Amassian, Aram
Patsalas, Panos A. [3 ]
Anthopoulos, Thomas D. [1 ,2 ,4 ]
机构
[1] Imperial Coll London, Dept Phys, London SW7 2AZ, England
[2] Imperial Coll London, Ctr Plast Elect, Blackett Lab, London SW7 2AZ, England
[3] Aristotle Univ Thessaloniki, Dept Phys, GR-54124 Thessaloniki, Greece
[4] King Abdullah Univ Sci & Technol, Div Phys Sci & Engn, Thuwal 239556900, Saudi Arabia
基金
英国工程与自然科学研究理事会; 欧洲研究理事会;
关键词
INDIUM TIN OXIDE; HIGH-PERFORMANCE; LOW-TEMPERATURE; METAL-OXIDES; SEMICONDUCTOR; CHANNEL; MODULATION; LIGHT; CRYSTALLINE; FABRICATION;
D O I
10.1126/sciadv.1602640
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Thin-film transistors made of solution-processedmetal oxide semiconductors hold great promise for application in the emerging sector of large-area electronics. However, further advancement of the technology is hindered by limitations associated with the extrinsic electron transport properties of the often defect-prone oxides. We overcome this limitation by replacing the single-layer semiconductor channel with a low-dimensional, solution-grown In2O3/ZnO heterojunction. We find that In2O3/ZnO transistors exhibit band-like electron transport, with mobility values significantly higher than single-layer In2O3 and ZnO devices by a factor of 2 to 100. This marked improvement is shown to originate from the presence of free electrons confined on the plane of the atomically sharp heterointerface induced by the large conduction band offset between In2O3 and ZnO. Our finding underscores engineering of solution-grown metal oxide heterointerfaces as an alternative strategy to thin-film transistor development and has the potential for widespread technological applications.
引用
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页数:9
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