Comparative Study of Short-Channel Effects Between Source-Gated Transistors and Standard Thin-Film Transistors

被引:8
|
作者
Wang, Zhenze [1 ]
Luo, Li [1 ]
Wang, Yiming [1 ]
Zhang, Jiawei [2 ,3 ]
Song, Aimin [2 ,4 ]
机构
[1] Shandong Univ, Shandong Technol Ctr Nanodevices & Integrat, Sch Microelect, Jinan 250100, Peoples R China
[2] Shandong Univ, Shandong Technol Ctr Nanodevices & Integrat, Sch Microelect, State Key Lab Crystal Mat, Jinan 250100, Peoples R China
[3] Shandong Univ, Suzhou Res Inst, Suzhou 215123, Peoples R China
[4] Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, England
基金
中国国家自然科学基金;
关键词
Drain-induced barrier lowering (DIBL); Schottky contact; short-channel effect; source-gated transistor (SGT); thin-film transistor (TFT); ARRAYS;
D O I
10.1109/TED.2021.3140043
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
With the development of virtual reality and augmented reality, the pixel sizes of displays are reaching the sub- micrometer regime. One of the main challenges is the short-channel effect of the thin-film transistors (TFTs) in the driving circuits. In this work, we report the shortchannel effects of indium-gallium-zinc-oxide source-gated transistor (IGZO SGT). The simulation results show that when reducing the channel length down to 500 nm, the output impedance of the IGZO SGT is still high up to 4.13 x 108 Omega. mu m at gate-source voltage (V-GS) of 5 V and drain-source voltage (V-DS) of 7 V, 437 times higher than that of a conventional IGZO TFT of the same dimension. It is found that the Schottky source contact in SGTs can effectively suppress the back-channel current as compared with TFTs. The threshold voltage of short-channel SGTs remains almost the same when applying different drain voltages in contrast to TFTs. When V-DS changes from 5 to 7 V at V-GS = 5 V, the drain current of the IGZO TFT increases 23.7%, while the drain current of the SGT only increases 0.8%. The experimental results of IGZO TFTs and SGTs with a channel length of 500 nm showed similar dependence on the drain voltageto the simulation results. Such insensitivity to short-channel effectsmakes SGTs a promising candidate as current driving transistors in high-pixel-density display circuits.
引用
收藏
页码:561 / 566
页数:6
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