Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge

The time-resolved negative oxygen ion density n(-) close to the center line in a reactive pulsed dc magnetron discharge (10 kHz and 50% duty cycle) has been determined for the first time using a combination of laser photodetachment and resonance hairpin probing. The discharge was operated at a power of 50 W in 70% argon and 30% oxygen gas mixtures at 1.3 Pa pressure. The results show that the O(-) density remains pretty constant during the driven phase of the discharge at values typically below 5 x 10(14) m(-3); however, in the off-time, the O(-) density grows reaching values several times those in the on-time. This leads to the negative ion fraction (or degree of electronegativity alpha=n(-)/n(e) being higher in the off phase (maximum value alpha similar to 1) than in the on phase (alpha = 0.05-0.3). The authors also see higher values of alpha at positions close to the magnetic null than in the more magnetized region of the plasma. This fractional increase in negative ion density during the off-phase is attributed to the enhanced dissociative electron attachment of highly excited oxygen molecules in the cooling plasma. The results show that close to the magnetic null the photodetached electron density decays quickly after the laser pulse, followed by a slow decay over a few microseconds governed by the negative ion temperature. However, in the magnetized regions of the plasma, this decay is more gradual. This is attributed to the different cross-field transport rates for electrons in these two regions. The resonance hairpin probe measurements of the photoelectron densities are compared directly to photoelectron currents obtained using a conventional Langmuir probe. There is good agreement in the general trends, particularly in the off-time. c 2011 American Vacuum Society. [DOI: 10.1116/1.3580934]