Silicon-on-nitride slot waveguide: A promising platform as mid-IR trace gas sensor

被引：59

作者：

Kumari, Babita ^{[1
]}

Barh, Ajanta ^{[1
,3
]}

Varshney, R. K. ^{[1
]}

Pal, B. P. ^{[2
]}

机构：

[1] Indian Inst Technol Delhi, Dept Phys, New Delhi 110016, India

[2] Mahindra Ecole Cent, Sch Nat Sci, Hyderabad 500043, Andhra Pradesh, India

[3] DTU Fotonik, Dept Photon Engn, Lyngby, Denmark

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2016年 / 236卷

关键词：

Integrated optical devices; Evanescent field sensor; Silicon-on-insulator structure; Slot waveguide; Mid-IR photonics; RING-RESONATOR; BIOSENSOR;

D O I：

10.1016/j.snb.2016.06.060

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We propose design of a chip-scale evanescent field absorption-based trace gas sensor, exploiting silicon-on-nitride (SON) slot waveguide structure at mid-IR wavelength region. As an example, we numerically demonstrate detectability of NH3 gas in the atmosphere at its characteristic absorption wavelength of 3 mu m. Using the optimum sensor design, detection down to 5 ppm including loss is viable in just similar to 8.7 mm length of the proposed slot waveguide. The achievable evanescent field fraction (eta) is upto similar to 43%. Our tolerance studies show that eta is relatively more critical to the slot width as compared to its height. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：759 / 764

页数：6

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