Silicon-on-nitride slot waveguide: A promising platform as mid-IR trace gas sensor

被引:59
作者
Kumari, Babita [1 ]
Barh, Ajanta [1 ,3 ]
Varshney, R. K. [1 ]
Pal, B. P. [2 ]
机构
[1] Indian Inst Technol Delhi, Dept Phys, New Delhi 110016, India
[2] Mahindra Ecole Cent, Sch Nat Sci, Hyderabad 500043, Andhra Pradesh, India
[3] DTU Fotonik, Dept Photon Engn, Lyngby, Denmark
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2016年 / 236卷
关键词
Integrated optical devices; Evanescent field sensor; Silicon-on-insulator structure; Slot waveguide; Mid-IR photonics; RING-RESONATOR; BIOSENSOR;
D O I
10.1016/j.snb.2016.06.060
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We propose design of a chip-scale evanescent field absorption-based trace gas sensor, exploiting silicon-on-nitride (SON) slot waveguide structure at mid-IR wavelength region. As an example, we numerically demonstrate detectability of NH3 gas in the atmosphere at its characteristic absorption wavelength of 3 mu m. Using the optimum sensor design, detection down to 5 ppm including loss is viable in just similar to 8.7 mm length of the proposed slot waveguide. The achievable evanescent field fraction (eta) is upto similar to 43%. Our tolerance studies show that eta is relatively more critical to the slot width as compared to its height. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:759 / 764
页数:6
相关论文
共 21 条
[1]   Guiding and confining light in void nanostructure [J].
Almeida, VR ;
Xu, QF ;
Barrios, CA ;
Lipson, M .
OPTICS LETTERS, 2004, 29 (11) :1209-1211
[2]   SILICON OXYNITRIDE - A MATERIAL FOR GRIN OPTICS [J].
BAAK, T .
APPLIED OPTICS, 1982, 21 (06) :1069-1072
[3]   Silicon-on-sapphire integrated waveguides for the mid-infrared [J].
Baehr-Jones, Tom ;
Spott, Alexander ;
Ilic, Rob ;
Spott, Andrew ;
Penkov, Boyan ;
Asher, William ;
Hochberg, Michael .
OPTICS EXPRESS, 2010, 18 (12) :12127-12135
[4]   VERIFICATION OF REVISED WATER-VAPOR CORRECTION TO THE INDEX OF REFRACTION OF AIR [J].
BEERS, J ;
DOIRON, T .
METROLOGIA, 1992, 29 (04) :315-316
[5]   High-accuracy, midinfrared (450 cm-1≤ω≤4000 cm-1) refractive index values of silicon -: art. no. 123526 [J].
Chandler-Horowitz, D ;
Amirtharaj, PM .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (12)
[6]   Mid-infrared Suspended Membrane Waveguide and Ring Resonator on Silicon-on-Insulator [J].
Cheng, Zhenzhou ;
Chen, Xia ;
Wong, Chi Yan ;
Xu, Ke ;
Tsang, Hon Ki .
IEEE PHOTONICS JOURNAL, 2012, 4 (05) :1510-1519
[7]  
Frey B., 2006, P C INT SOC OPT PHOT
[8]   Optical gas sensing: a review [J].
Hodgkinson, Jane ;
Tatam, Ralph P. .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2013, 24 (01)
[9]  
Huang Y., 2012, COST RED HEALTHC LEA, P1
[10]   Highly sensitive Mach-Zehnder interferometer biosensor based on silicon nitride slot waveguide [J].
Liu, Qing ;
Tu, Xiaoguang ;
Kim, Kyung Woo ;
Kee, Jack Sheng ;
Shin, Yong ;
Han, Kyungsup ;
Yoon, Yong-Jin ;
Lo, Guo-Qiang ;
Park, Mi Kyoung .
SENSORS AND ACTUATORS B-CHEMICAL, 2013, 188 :681-688