Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure

被引：32

作者：

Alan, Tuncay ^{[1
,2
]}

Yokosawa, Tadahiro ^{[3
]}

Gaspar, Joao ^{[4
,5
]}

Pandraud, Gregory ^{[1
]}

Paul, Oliver ^{[4
]}

Creemer, Fredrik ^{[1
]}

Sarro, Pasqualina M. ^{[1
]}

Zandbergen, Henny W. ^{[3
]}

机构：

[1] Delft Univ Technol, Delft Inst Microsyst & Nanoelect, NL-2628 CT Delft, Netherlands

[2] Monash Univ, Dept Mech & Aerosp Engn, Clayton, Vic 3800, Australia

[3] Delft Univ Technol, Ctr High Resolut Elect Microscopy, NL-2628 CJ Delft, Netherlands

[4] Univ Freiburg, Dept Microsyst Engn IMTEK, D-79110 Freiburg, Germany

[5] Int Iberian Nanotechnol Lab INL, P-4715330 Braga, Portugal

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 08期

关键词：

HYDROGEN-STORAGE; FILMS;

D O I：

10.1063/1.3688490

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high pressures to be sustained by the device. Nanomechanical bulge tests and simulations show that due to a very strong size effect, ultra-thin device components can reliably withstand tensile stresses as high as 19.5 GPa enabling high pressure operation. We use the device to characterize Pd particles under a 4-bar H-2 pressure within the ultra-high-vacuum of the TEM. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3688490]

引用

页数：4

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