Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching

被引：3
|
作者：
Su, L. [1 ]
Rowlands, C. J. [1 ]
Lee, T. H. [1 ]
Elliott, S. R. [1 ]
机构：
[1] Univ Cambridge, Dept Chem, Cambridge CB2 1EW, England
来源：
ELECTRONICS LETTERS | 2008年 / 44卷 / 07期
关键词：
7;
D O I：
10.1049/el:20080510
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A selective wet-etching method for micro-fabricating As2S3 glass ridge waveguides, using CS2 solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photoinduced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2 dB/cm loss reduction compared to laser direct-written channel waveguides.
引用
收藏
页码：472 / 473
页数：2
相关论文
共 50 条
  • [31] Wet-etching fabrication of multilayer GaAlAs/GaAs microtips for scanning near-field optical microscopy
    S. Khalfallah
    C. Gorecki
    J. Podlecki
    M. Nishioka
    H. Kawakatsu
    Y. Arakawa
    Applied Physics A, 2000, 71 (2) : 223 - 225
  • [32] Wet-etching fabrication of multilayer GaAlAs/GaAs microtips for scanning near-field optical microscopy
    Khalfallah, S
    Gorecki, C
    Podlecki, J
    Nishioka, M
    Kawakatsu, H
    Arakawa, Y
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (02): : 223 - 225
  • [33] Investigations on magnetic properties in ultrathin single crystal Fe rectangular arrays patterned by selective wet-etching
    Sun, L.
    Wong, P. K. J.
    Niu, D. X.
    Zou, X.
    Zhai, Y.
    Wu, J.
    Xu, Y. B.
    Zhai, H. R.
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (07)
  • [34] Fabrication of photonic crystal membranes in chalcogenide glasses by focused ion beam milling
    Freeman, D
    Madden, S
    Luther-Davies, B
    Grillet, C
    Asatryan, AA
    Dossou, K
    Byrne, MA
    Botten, LC
    2005 CONFERENCE ON LASERS & ELECTRO-OPTICS (CLEO), VOLS 1-3, 2005, : 71 - +
  • [35] Fabrication of photonic crystal membranes in chalcogenide glasses by focused ion beam milling
    Freeman, D
    Madden, S
    Luther-Davies, B
    COMMAD 04: 2004 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES, PROCEEDINGS, 2005, : 157 - 160
  • [36] Selective wet-etching of InGaAs on InAlAs using adipic acid and its application to InAlAs/InGaAs HEMTs
    Higuchi, K
    Uchiyama, H
    Shiota, T
    Kudo, M
    Mishima, T
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1997, 12 (04) : 475 - 480
  • [37] Fine embossing of chalcogenide glasses - A new fabrication route for photonic integrated circuits
    Seddon, A. B.
    Pan, W. J.
    Furniss, D.
    Miller, C. A.
    Rowe, H.
    Zhang, D.
    McBrearty, E.
    Zhang, Y.
    Loni, A.
    Sewell, P.
    Benson, T. M.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (23-25) : 2515 - 2520
  • [38] InAlAs/InGaAs HEMTs with uniform threshold voltage fabricated by selective wet-etching using adipic acid
    Higuchi, K
    Uchiyama, H
    Shiota, T
    Kudo, M
    Mishima, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (3B): : 1822 - 1825
  • [39] Comparison of Micro-Fabrication Routes for Magneto-Impedance Elements: Lift-Off and Wet-Etching
    Garcia-Arribas, A.
    Fernandez, E.
    Barrainkua, A.
    Svalov, A. V.
    Kurlyandskaya, G. V.
    Barandiaran, J. M.
    IEEE TRANSACTIONS ON MAGNETICS, 2012, 48 (04) : 1601 - 1604
  • [40] Third-harmonic generation in engineered slow light photonic crystal waveguides in chalcogenide glasses
    Monat, Christelle
    Spurny, Marcel
    Grillet, Christian
    O'Faolain, Liam
    Krauss, Thomas F.
    Eggleton, Benjamin J.
    Bulla, Douglas
    Madden, Steve
    Luther-Davies, Barry
    2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2011,
12345