Conformal Organic-Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol (vol 115, pg 5930, 2011)

被引:4
作者
Gong, Bo
Peng, Qing
Parsons, Gregory N.
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关键词
D O I
10.1021/jp205915n
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:11028 / 11028
页数:1
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[1]   Conformal Organic - Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol [J].
Gong, Bo ;
Peng, Qing ;
Parsons, Gregory N. .
JOURNAL OF PHYSICAL CHEMISTRY B, 2011, 115 (19) :5930-5938