Ultrashort pulse lasers in high-rate laser micro processing - Quo vadis?

[11] High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source [J]. OPTICS LETTERS, 2019, 44 (09) : 2193 - 2196

[12] Influence of the burst mode onto the specific removal rate for metals and semiconductors [J]. JOURNAL OF LASER APPLICATIONS, 2019, 31 (02)

[13] Processing of metals and dielectric materials with ps-laserpulses: results, strategies, limitations and needs [J]. LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING XV, 2010, 7584

[14] Petelin J., 2021, ADV OPT TECHNOL, V10, P305, DOI [10.1515/aot-2021-0020, DOI 10.1515/AOT-2021-0020]

[15] Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High? [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2009, 4 (03): : 186 - 191

[16] Accelerating laser processes with a smart two-dimensional polygon mirror scanner for ultra-fast beam deflection [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 297 - 304

[17] High-Rate Laser Surface Texturing for Advanced Tribological Functionality [J]. LUBRICANTS, 2020, 8 (03)

[18] Process optimization in high-average-power ultrashort pulse laser microfabrication: how laser process parameters influence efficiency, throughput and quality [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2015, 120 (03): : 847 - 855

[19] High-power modelocked thin-disk oscillators as potential technology for high-rate material processing [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 247 - 261

[20] The challenges of productive materials processing with ultrafast lasers [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 239 - 245

[11] High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source [J]. OPTICS LETTERS, 2019, 44 (09) : 2193 - 2196

[12] Influence of the burst mode onto the specific removal rate for metals and semiconductors [J]. JOURNAL OF LASER APPLICATIONS, 2019, 31 (02)

[13] Processing of metals and dielectric materials with ps-laserpulses: results, strategies, limitations and needs [J]. LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING XV, 2010, 7584

[14] Petelin J., 2021, ADV OPT TECHNOL, V10, P305, DOI [10.1515/aot-2021-0020, DOI 10.1515/AOT-2021-0020]

[15] Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High? [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2009, 4 (03): : 186 - 191

[16] Accelerating laser processes with a smart two-dimensional polygon mirror scanner for ultra-fast beam deflection [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 297 - 304

[17] High-Rate Laser Surface Texturing for Advanced Tribological Functionality [J]. LUBRICANTS, 2020, 8 (03)

[18] Process optimization in high-average-power ultrashort pulse laser microfabrication: how laser process parameters influence efficiency, throughput and quality [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2015, 120 (03): : 847 - 855

[19] High-power modelocked thin-disk oscillators as potential technology for high-rate material processing [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 247 - 261

[20] The challenges of productive materials processing with ultrafast lasers [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 239 - 245