Ultrashort pulse lasers in high-rate laser micro processing - Quo vadis?

被引：15
作者：
Schille, Joerg [1 ]
Loeschner, Udo [1 ]
机构：
[1] Univ Appl Sci Mittweida, Laserinst Hsch Mittweida, Mittweida, Germany
来源：
ADVANCED OPTICAL TECHNOLOGIES | 2021年 / 10卷 / 4-5期
关键词：
high-rate; laser; micro processing; multi beam; polygon; ultrashort pulse; REPETITION-RATE; EFFICIENCY; MICROFABRICATION; ABLATION;
D O I：
10.1515/aot-2021-0049
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
[No abstract available]
引用
收藏
页码：233 / 237
页数：5
相关论文
共 20 条
  • [1] Ahmed M. A., 2021, ADV OPT TECHNOL, V10, P285
  • [2] GHz femtosecond processing with agile high-power laser High power and flexible fs lasers in GHz burst mode open new horizons for femtosecond laser processing
    Audouard, Eric
    Bonamis, Guillaume
    Honninger, Clemens
    Mottay, Eric
    [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 263 - 275
  • [3] Systematic study of laser ablation with GHz bursts of femtosecond pulses
    Bonamis, Guillaume
    Audouard, Eric
    Honninger, Clemens
    Lopez, John
    Mishchik, Konstantin
    Mottay, Eric
    Manek-Honninger, Inka
    [J]. OPTICS EXPRESS, 2020, 28 (19): : 27702 - 27714
  • [4] Multi beam microprocessing for printing and embossing applications with high power ultrashort pulsed lasers
    Bruening, Stephan
    Gillner, Arnold
    Du, Keming
    [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 315 - 331
  • [5] High-power ultrafast fiber lasers for materials processing
    Eidam, Tino
    Breitkopf, Sven
    Herrfurth, Oliver
    Stutzki, Fabian
    Kienel, Marco
    Haedrich, Steffen
    Gaida, Christian
    Limpert, Jens
    [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 277 - 283
  • [6] High Speed Laser Micro Processing Using High Brilliance Continuous Wave Laser Radiation
    Exner, Horst
    Hartwig, Lars
    Ebert, Robby
    Kloetzer, Sascha
    Streek, Andre
    Schille, Joerg
    Loeschner, Udo
    [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2012, 7 (01): : 115 - 121
  • [7] Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses
    Foerster, Daniel J.
    Jaeggi, Beat
    Michalowski, Andreas
    Neuenschwander, Beat
    [J]. MATERIALS, 2021, 14 (12)
  • [8] High-rate laser processing with ultrashort laser pulses by combination of diffractive elements with synchronized galvo scanning
    Gafner, Markus
    Remund, Stefan M.
    Chaja, Michalina W.
    Neuenschwander, Beat
    [J]. ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) : 333 - 352
  • [9] Kim S., 2004, J SEMICONDUCTOR TECH, V4, P217
  • [10] High-rate laser microprocessing using a polygon scanner system
    Loeschner, Udo
    Schille, Joerg
    Streek, Andre
    Knebel, Tommy
    Hartwig, Lars
    Hillmann, Robert
    Endisch, Christian
    [J]. JOURNAL OF LASER APPLICATIONS, 2015, 27
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