Impact of gate dielectric on overall electrical performance of Quadruple gate FinFET

被引:7
作者
Ho Le Minh Toan [1 ]
Goswami, Rupam [2 ]
机构
[1] Kalinga Inst Ind Technol KIIT, Sch Elect Engn, Bhubaneswar 751024, Odisha, India
[2] Tezpur Univ, Sch Engn, Dept Elect & Commun Engn, Tezpur 784028, Assam, India
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2022年 / 128卷 / 02期
关键词
Analog/RF; FinFET; Linearity; Sub-threshold slope; DIBL; INTERMODULATION DISTORTION; SOI MOSFETS; LINEARITY; SIMULATION; SILICON; ANALOG;
D O I
10.1007/s00339-021-05210-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Due to better scalability and more immunity to short channel effects in recent technology nodes, Quadruple gate FinFET is introduced as a potential candidate among multiple gate FET devices. This article presents an investigation of the impact of gate dielectric constant on DC electrical parameters in Quadruple gate FinFET. Drive current (I-ds), leakage current (I-off), current switching ratio (I-on /I-off), sub-threshold slope (SS) and drain induced barrier lowering (DIBL) are observed by varying gate dielectric constant. Additionally, the influence of the gate dielectric on analog/RF performance parameters in terms of transconductance (g(m)), output conductance (g(d)), intrinsic gain (g(m)/g(d)), gate capacitance (C-gg) cutoff frequency (f(t)), and intrinsic delay are reported with the help of a commercial two-dimensional device simulator. Along variation of gate dielectric constant, some linear parameters such as g(m2), g(m3), VIP2 are also analyzed for wireless communication. For high-k dielectric, due to enhancement of oxide capacitance, we observed an increase in drive current, transconductance, switching ratio, and gate capacitance. Linearity parameters are also strongly affected by operating gate dielectric.
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页数:12
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