High mobility two-dimensional electron gas in AlGaN/GaN heterostructures grown on bulk GaN by plasma assisted molecular beam epitaxy

被引:62
作者
Skierbiszewski, C
Dybko, K
Knap, W
Siekacz, M
Krupczynski, W
Nowak, G
Bockowski, M
Lusakowski, J
Wasilewski, ZR
Maude, D
Suski, T
Porowski, S
机构
[1] PAS, Inst High Pressure Phys, PL-01142 Warsaw, Poland
[2] Polish Acad Sci, Inst Phys, PL-02668 Warsaw, Poland
[3] Univ Montpellier 2, CNRS, GES UMR, F-34950 Montpellier, France
[4] Univ Warsaw, Inst Expt Phys, PL-00681 Warsaw, Poland
[5] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON, Canada
[6] MPI CNRS, Grenoble High Magnet Field Lab, F-38042 Grenoble, France
关键词
D O I
10.1063/1.1873056
中图分类号
O59 [应用物理学];
学科分类号
摘要
The results on growth and magnetotransport characterization of AlGaN/GaN heterostructures obtained by plasma assisted molecular beam epitaxy on dislocation-free (below 100 cm(-2)) GaN high pressure synthesized bulk substrates are presented. The record mobilities of the two dimensional electron gas, (2DEG) exceeding 100 000 cm(2)/V s at liquid helium temperature and 2500 cm(2)/V s at room temperature are reported. An analysis of the high field conductivity tensor components allowed us to discuss the main electron scattering mechanisms and to confirm unambiguously the 2DEG room temperature mobility values. (c) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
相关论文
共 21 条
[1]  
BOUGRIOUA Z, COMMUNICATION
[2]   Magnetic field dependent Hall data analysis of electron transport in modulation-doped AlGaN/GaN heterostructures [J].
Dziuba, Z ;
Antoszewski, J ;
Dell, JM ;
Faraone, L ;
Kozodoy, P ;
Keller, S ;
Keller, B ;
DenBaars, SP ;
Mishra, UK .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (06) :2996-3002
[3]   High mobility two-dimensional electron gas in AlGaN GaN heterostructures grown by plasma-assisted molecular beam epitaxy [J].
Elsass, CR ;
Smorchkova, IP ;
Heying, B ;
Haus, E ;
Fini, P ;
Maranowski, K ;
Ibbetson, JP ;
Keller, S ;
Petroff, PM ;
DenBaars, SP ;
Mishra, UK ;
Speck, JS .
APPLIED PHYSICS LETTERS, 1999, 74 (23) :3528-3530
[4]   High electron mobility in AlGaN/GaN heterostructures grown on bulk GaN substrates [J].
Frayssinet, E ;
Knap, W ;
Lorenzini, P ;
Grandjean, N ;
Massies, J ;
Skierbiszewski, C ;
Suski, T ;
Grzegory, I ;
Porowski, S ;
Simin, G ;
Hu, X ;
Khan, MA ;
Shur, MS ;
Gaska, R ;
Maude, D .
APPLIED PHYSICS LETTERS, 2000, 77 (16) :2551-2553
[5]   Electron mobility in modulation-doped AlGaN-GaN heterostructures [J].
Gaska, R ;
Shur, MS ;
Bykhovski, AD ;
Orlov, AO ;
Snider, GL .
APPLIED PHYSICS LETTERS, 1999, 74 (02) :287-289
[6]   GaN substrates for molecular beam epitaxy growth of homoepitaxial structures [J].
Grzegory, I ;
Porowski, S .
THIN SOLID FILMS, 2000, 367 (1-2) :281-289
[7]   Effect of polarization fields on transport properties in AlGaN/GaN heterostructures [J].
Hsu, L ;
Walukiewicz, W .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (03) :1783-1789
[8]   Spin and interaction effects in Shubnikov-de Haas oscillations and the quantum Hall effect in GaN/AlGaN heterostructures [J].
Knap, W ;
Fal'ko, VI ;
Frayssinet, E ;
Lorenzini, P ;
Grandjean, N ;
Maude, D ;
Karczewski, G ;
Brandt, BL ;
Lusakowski, J ;
Grzegory, I ;
Leszczynski, M ;
Prystawko, P ;
Skierbiszewski, C ;
Porowski, S ;
Hu, X ;
Simin, G ;
Khan, MA ;
Shur, MS .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (20) :3421-3432
[9]   High-mobility AlGaN/GaN heterostructures grown by molecular-beam epitaxy on GaN templates prepared by hydride vapor phase epitaxy [J].
Manfra, MJ ;
Pfeiffer, LN ;
West, KW ;
Stormer, HL ;
Baldwin, KW ;
Hsu, JWP ;
Lang, DV ;
Molnar, RJ .
APPLIED PHYSICS LETTERS, 2000, 77 (18) :2888-2890
[10]   Electron mobility exceeding 160000 cm2/V s in AlGaN/GaN heterostructures grown by molecular-beam epitaxy [J].
Manfra, MJ ;
Baldwin, KW ;
Sergent, AM ;
West, KW ;
Molnar, RJ ;
Caissie, J .
APPLIED PHYSICS LETTERS, 2004, 85 (22) :5394-5396