Stress gradient analysis by noncomplanar x-ray diffraction and corresponding refraction correction

X-ray residual stress analysis is a widespread nondestructive technique to investigate the residual stress and residual stress gradient in thin films and protective coatings. In the present contribution we introduce a new method based on the noncomplanar measurement geometry that allow to span large area of sin(2)psi and penetration depth values without sample inclination. The refraction correction and absorption is considered in details for the noncomplanar measurements. The proposed technique is applied to determine stress gradients of blasted hard TiN coatings.