HETEROGENEOUS SURFACE RECOMBINATION OF NEUTRAL NITROGEN ATOMS

被引:0
|
作者
Vesel, Alenka [1 ]
机构
[1] Ctr Excellence Polymer Mat & Technol, Ljubljana 1000, Slovenia
来源
MATERIALI IN TEHNOLOGIJE | 2012年 / 46卷 / 01期
关键词
nitrogen plasma; neutral nitrogen atoms; surface recombination; recombination probability; LOSS PROBABILITY; CATALYTIC EFFICIENCY; OXYGEN-ATOMS; KINETICS; TEMPERATURE; REMOVAL; PLASMAS; ARGON; PYREX;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
An overview of data reported in literature on heterogeneous surface recombination of nitrogen atoms is presented. The data are often scattered for over an order of magnitude depending on experimental technique and perhaps also on surface finish. As a general rule the recombination coefficient is rather small for materials that do not chemisorb nitrogen atoms, and it is rather large for some metals that are known as catalysts. Values as low as 5x10(-8) have been reported for Pyrex glass, although a typical value of the recombination coefficient for glasses is rather 1 x10(-5). The similar order of magnitude is found for very stable polymers such as polytetrafluoroethylene (teflon), although larger values are typical for some other polymers. The recombination coefficient for metals is typically 10(-2) but can be as large as 0.3 for selected catalysts.
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页码:7 / 12
页数:6
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