Computed gas-phase rate coefficients for thermal decomposition of CVD precursors.

被引:0
|
作者
Walch, SP [1 ]
Dateo, CE [1 ]
机构
[1] NASA, Ames Res Ctr, Thermosci Inst, Moffett Field, CA 94035 USA
来源
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1999年 / 217卷
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
324-PHYS
引用
收藏
页码:U374 / U374
页数:1
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