Computed gas-phase rate coefficients for thermal decomposition of CVD precursors.

被引：0
|
作者：
Walch, SP [1 ]
Dateo, CE [1 ]
机构：
[1] NASA, Ames Res Ctr, Thermosci Inst, Moffett Field, CA 94035 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1999年 / 217卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
324-PHYS
引用
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页码：U374 / U374
页数：1
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