NbTiN thin films for superconducting photon detectors on photonic and two-dimensional materials

被引：35

作者：

Steinhauer, Stephan ^{[1
]}

Yang, Lily ^{[1
]}

Gyger, Samuel ^{[1
]}

Lettner, Thomas ^{[1
]}

Errando-Herranz, Carlos ^{[1
]}

Jons, Klaus D. ^{[1
]}

Baghban, Mohammad Amin ^{[1
]}

Gallo, Katia ^{[1
]}

Zichi, Julien ^{[1
]}

Zwiller, Val ^{[1
]}

机构：

[1] KTH Royal Inst Technol, Dept Appl Phys, SE-10691 Stockholm, Sweden

来源：

APPLIED PHYSICS LETTERS | 2020年 / 116卷 / 17期

基金：

欧洲研究理事会; 瑞典研究理事会;

关键词：

INTEGRATION;

D O I：

10.1063/1.5143986

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Integration of superconducting devices on photonic platforms opens up a wide range of functionalities and applications. We report on NbTiN thin films deposited on SiO2, Si3N4, GaAs, LiNbO3, and AlN as well as on a monolayer of hexagonal boron nitride, using a universal reactive co-sputtering recipe. The morphology and the superconducting properties of the NbTiN thin films with a thickness of 10nm were characterized by atomic force microscopy and electrical transport measurements. Superconducting strip photon detectors were fabricated using a design suitable for waveguide integration and compared in terms of their internal quantum efficiency and detection pulse kinetics. Our results show well-comparable performances for detectors integrated on different platforms, while also demonstrating that reactive co-sputter deposition of NbTiN at room temperature provides a robust method for realizing superconducting devices on various materials.

引用

页数：5

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