Influence of the Discharge Burning Conditions on Distributions of the Parameters of Plasma Generated in a Non-Self-Sustaining Glow Discharge Inside a Hollow Cathode

被引：3

作者：

Ignatov, D. Yu ^{[1
]}

Kovalsky, S. S. ^{[1
]}

Denisov, V. V. ^{[1
]}

Lopatin, I., V ^{[1
]}

Koval, N. N. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk, Russia

来源：

RUSSIAN PHYSICS JOURNAL | 2022年 / 64卷 / 11期

关键词：

glow discharge; hollow cathode; hot and hollow cathode arc discharge; low pressure discharge; double probe; plasma parameters; SURFACES;

D O I：

10.1007/s11182-022-02573-w

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The parameters of the plasma of a non-self-sustaining glow discharge generated inside a metal hollow cathode 300 mm long and 25 mm in inner diameter are investigated. A feature of this system is the additional injection of electrons from the auxiliary discharge plasma formed by the plasma source with a combined PINK heated and hollow cathode. The dependences and combustion modes of the non-self-sustaining glow discharge are presented and described at a pressure in the range (0.06-1.4) Pa and a combustion voltage of (70-300) V. Studies of the plasma parameters using double Langmuir probes have shown that this discharge system provides generation of the nitrogen plasma inside the hollow cathode with inhomogeneity from +/- 12 to +/- 63%.

引用

页码：2170 / 2176

页数：7

共 13 条

[1] Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode [J].

Akhmadeev, Yu. H. ;

Denisov, V. V. ;

Koval, N. N. ;

Kovalsky, S. S. ;

Lopatin, I. V. ;

Schanin, P. M. ;

Yakovlev, V. V. .

PLASMA PHYSICS REPORTS, 2017, 43 (01) :67-74

[2]

Borisov D. P., 1994, Russian Physics Journal, V37, P295, DOI 10.1007/BF00565740

[3] Nitriding of Internal Cylindrical Surfaces in Abnormal Glow Discharge [J].

Borisyuk Y.V. ;

Mozgrin D.V. ;

Oreshnikova N.M. ;

Berdnikova M.M. ;

Pisarev A.A. .

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2018, 12 (3) :603-606

[4] Plasma nitriding of the inner surface of stainless steel tubes [J].

Braceras, Inigo ;

Ibanez, Inigo ;

Dominguez-Meister, Santiago ;

Angel Sanchez-Garcia, Jose ;

Brizuela, Marta ;

Larranaga, Aitor ;

Garmendia, Inaki .

SURFACE & COATINGS TECHNOLOGY, 2018, 355 :116-122

[5]

Goncharenko I. M., RF Patent, Patent No. 2039845

[6]

Ignatov D., 2020, IEEE 7 INT C EN FLUX

[7] Generation of Plasma in Non-Self-Sustained Glow Discharge With Hollow Cathode for Nitriding Inner Surfaces of Elongated and Complex Shaped Cavities [J].

Ignatov, Danil Yu ;

Lopatin, Ilya, V ;

Denisov, Vladimir V. ;

Koval, Nikolay N. ;

Ahmadeev, Yuri H. .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2020, 48 (06) :2050-2059

[8] Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes [J].

Koval, N. N. ;

Ryabchikov, A. I. ;

Sivin, D. O. ;

Lopatin, I. V. ;

Krysina, O. V. ;

Akhmadeev, Yu. H. ;

Ignatov, D. Yu. .

SURFACE & COATINGS TECHNOLOGY, 2018, 340 :152-158

[9] GEOMETRIC EFFECT OF ION NITRIDING ON THE NITRIDE GROWTH-BEHAVIOR IN HOLLOW TUBE [J].

KWON, SC ;

PARK, MJ ;

BAEK, WS ;

LEE, GH .

JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 1992, 1 (03) :353-358

[10] Effect of thermionic cathode heating current self-magnetic field on gaseous plasma generator characteristics [J].

Lopatin, I. V. ;

Akhmadeev, Yu. H. ;

Koval, N. N. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (10)

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