Influence of the Discharge Burning Conditions on Distributions of the Parameters of Plasma Generated in a Non-Self-Sustaining Glow Discharge Inside a Hollow Cathode

被引：3

作者：

Ignatov, D. Yu ^{[1
]}

Kovalsky, S. S. ^{[1
]}

Denisov, V. V. ^{[1
]}

Lopatin, I., V ^{[1
]}

Koval, N. N. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk, Russia

来源：

RUSSIAN PHYSICS JOURNAL | 2022年 / 64卷 / 11期

关键词：

glow discharge; hollow cathode; hot and hollow cathode arc discharge; low pressure discharge; double probe; plasma parameters; SURFACES;

D O I：

10.1007/s11182-022-02573-w

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The parameters of the plasma of a non-self-sustaining glow discharge generated inside a metal hollow cathode 300 mm long and 25 mm in inner diameter are investigated. A feature of this system is the additional injection of electrons from the auxiliary discharge plasma formed by the plasma source with a combined PINK heated and hollow cathode. The dependences and combustion modes of the non-self-sustaining glow discharge are presented and described at a pressure in the range (0.06-1.4) Pa and a combustion voltage of (70-300) V. Studies of the plasma parameters using double Langmuir probes have shown that this discharge system provides generation of the nitrogen plasma inside the hollow cathode with inhomogeneity from +/- 12 to +/- 63%.

引用

页码：2170 / 2176

页数：7

共 13 条

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