Rapid fabrication of thermoplastic polymer refractive microlens array using contactless hot embossing technology

被引:39
作者
Xie, Dan [1 ,2 ]
Chang, Xuefeng [1 ,2 ]
Shu, Xiayun [1 ,2 ]
Wang, Yingchun [2 ]
Ding, Huanqi [1 ,2 ]
Liu, Yangxu [1 ,2 ]
机构
[1] Xiamen Univ Technol, Sch Mech & Automot Engn, Xiamen 361024, Peoples R China
[2] Fujian Prov Univ, Key Lab Precis Actuat & Transmiss, Xiamen 361024, Peoples R China
基金
中国国家自然科学基金;
关键词
LENS ARRAY; LOW-COST; DESIGN; MOLD;
D O I
10.1364/OE.23.005154
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A thermoplastic polymer refractive microlens array has been rapidly fabricated by contactless hot embossing technology through the stainless steel template with micro through-holes array, which has a diameter of 150 mu m and a pitch of 185 mu m. By optimizing the technical parameters including heating and demoulding temperature, loading pressure, loading and pressure holding time, a series of high quality microlenses arrays of different sags could be obtained. In addition, the sag and the radius of curvature of the microlens are controllable. The geometrical and optical properties of the microlenses are measured and the influence of temperature and pressure duration on the optical properties of the microlenses are analysed. The results show good surface features and optical performances. Unlike previous contactless hot embossing, a low cost and durable stainless steel template was utilized instead of silicon or nickel mold to avoid valuable equipments and complicated fabrication procedure. Besides, the whole contactless hot embossing process was absence of vacuum equipment. We think that the technology could be an attractive high flexibility method for enhancing efficiency and reducing cost. (C) 2015 Optical Society of America
引用
收藏
页码:5154 / 5166
页数:13
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