Coating on Porous Si3N4 Based Substrate with Sol-Gel Slurry

被引：1
作者：
Zhang, Chaochen [1 ]
Li, Xiaolei [1 ]
Ji, Huiming [1 ]
Sun, Xiaohong [1 ]
机构：
[1] Tianjin Univ, Sch Mat Sci & Engn, Key Lab Adv Ceram & Machining Technol, Minist Educ, Tianjin 300072, Peoples R China
来源：
INTEGRATED FERROELECTRICS | 2012年 / 138卷
关键词：
Coating; silicon; alumina sol; chemical synthesis and surface properties; SILICON-NITRIDE; ALUMINA COATINGS; THIN-FILMS;
D O I：
10.1080/10584587.2012.688475
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The coating was prepared on porous Si3N4 based substrate by dip-coating from sol-gel slurry. The slurry was made by adding pretreated silicon into alumina sol. The coated substrate was heated at 1420 degrees C in nitrogen atmosphere. The phase of dried powder from slurry was studied by X-ray diffraction. The surface morphology of coated substrate was determined by scanning electronic microscope. The results indicated that the slurry well infiltrated into porous substrate and filled up surface pores effectively. The coating bonded with substrate firmly without obvious interface. The results showed that the main phases of coating were beta-Sialon and O'-Sialon.
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页码：111 / 116
页数：6
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