Multi-scale laser direct writing of conductive metal microstructures using a 405-nm blue laser

被引：15

作者：

Komori, Takuma ^{[1
]}

Furukawa, Taichi ^{[2
]}

Iijima, Motoyuki ^{[3
]}

Maruo, Shoji ^{[2
]}

机构：

[1] Yokohama Natl Univ, Grad Sch Engn, 79-5 Tokiwadai, Yokohama, Kanagawa 2408501, Japan

[2] Yokohama Natl Univ, Fac Engn, 79-5 Tokiwadai, Yokohama, Kanagawa 2408501, Japan

[3] Yokohama Natl Univ, Fac Environm & Informat Sci, 79-7 Tokiwadai, Yokohama, Kanagawa 2408501, Japan

来源：

OPTICS EXPRESS | 2020年 / 28卷 / 06期

基金：

日本学术振兴会;

关键词：

FABRICATION; PHOTOREDUCTION; DEPOSITION;

D O I：

10.1364/OE.388593

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A multi-scale direct writing method for metal microstructures is proposed and demonstrated. In this study, metal structures were created in a gelatin matrix containing silver nitrate by photoreduction using a 405-nm blue laser. The influence of concentrations of materials in the sample solution was evaluated by measuring the conductivity of the fabricated microstructures. The fabrication line width could be controlled by changing the laser scanning speed. A network structure was also observed, which possibly helps in increasing the microstructure's conductivity. Finally, we demonstrated multi-scale drawing by using objective lenses with different numerical apertures. Our method can result in new possibilities for conductive metal direct writing. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：8363 / 8370

页数：8

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