Multi-axis dielectric liquid-based tactile sensor with tunable sensing range and sensitivity

被引：0
|
作者：
Kai-Wei, Liao [1 ]
Hou, Max T. [2 ]
Yeh, J. Andrew [3 ]
机构：
[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan
[2] Natl United Univ, Dept Mech Engn, Miaoli, Taiwan
[3] Instrument Technol Res Ctr, Natl Appl Res Labs, Hsinchu, Taiwan
来源：
2016 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2016年
关键词：
tactile sensor; tactile sensing; tunable sensing ranges; dielectric liquid;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a novel multi-axis tactile sensor has tunable sensing ranges and sensitivity. A low dielectric constant (epsilon(r)) droplet covered with high epsilon(r) liquid are employed as the dielectric material of this sensor. The sensing range and sensitivity can be adjusted by varying the shape of the droplet by controlling the dielectric force supplied by driving voltage. The results show the sensor is capable of multi-axis force sensing. The normal force sensing range is adjustable from 0 mN similar to 400 mN to 0 mN similar to 250 mN. And the sensitivity of the sensor for normal/shear force can be tuned 1.6/1.4 times greater than the sensor in its original state.
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页数：4
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