One-dimensional anodic TiO2 nanotubes coated by atomic layer deposition: Towards advanced applications

被引：85

作者：

Dvorak, Filip ^{[1
]}

Zazpe, Raul ^{[1
,2
]}

Krbal, Milos ^{[1
]}

Sopha, Hanna ^{[1
,2
]}

Prikryl, Jan ^{[1
]}

Ng, Siowwoon ^{[2
]}

Hromadko, Ludek ^{[1
]}

Bures, Filip ^{[3
]}

Macak, Jan M. ^{[1
,2
]}

机构：

[1] Univ Pardubice, Fac Chem Technol, Ctr Mat & Nanotechnol, Nam Cs Legii 565, Pardubice 53002, Czech Republic

[2] Brno Univ Technol, Cent European Inst Technol, Purkynova 123, Brno 61200, Czech Republic

[3] Univ Pardubice, Fac Chem Technol, Inst Organ Chem & Technol, Studentska 573, Pardubice 53210, Czech Republic

来源：

APPLIED MATERIALS TODAY | 2019年 / 14卷

基金：

欧洲研究理事会;

关键词：

Atomic layer deposition; TiO2; nanotube; Coatings; Functionalization; Aspect ratio; TITANIUM-DIOXIDE NANOMATERIALS; ALUMINA TUBULAR MEMBRANES; QUANTUM DOTS; SOLAR-CELLS; PHOTOELECTROCHEMICAL PROPERTIES; NANOSTRUCTURED MATERIALS; SURFACE MODIFICATION; CARBON NANOTUBES; NANOWIRE ARRAYS; PORE REDUCTION;

D O I：

10.1016/j.apmt.2018.11.005

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Atomic layer deposition (ALD) represents a unique deposition technique that allows to coat uniformly various high aspect ratio (HAR) porous nano structures, in addition to its traditional role to coat flat substrates (e.g. Si wafers). Self-organized anodic TiO2 nanotube (TNT) layers belong among the most investigated inorganic nano structures. They possess highly functional materials with promising application potential across many technological fields. Herein, we review the utilization of ALD for the functionalization of anodic TNT layers by secondary materials to advance their physicochemical and photoelectrochemical properties. First, the application of ALD for functionalization of porous aluminium oxide, which represent fundamental HAR nanostructure, is briefly introduced. Then the main experimental parameters governing the uniformity and the conformality of ALD coating within HAR nanostructures are discussed. Finally, the review focuses on the use of ALD to deposit secondary materials into TNT layers for various purposes - the introduction of pioneering studies is followed by particular examples of ALD based functionalizations of coated TNT layers for optimized visible-light absorption, charge separation and passivation, (photo)catalysis, stability, gas sensing, and energy storage. (C) 2018 The Authors. Published by Elsevier Ltd.

引用

页码：1 / 20

页数：20

共 201 条

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