Study of oxygen chemisorption on the GaN(0001)-(1x1) surface

被引:278
作者
Bermudez, VM
机构
[1] Naval Research Laboratory, Washington
关键词
D O I
10.1063/1.362924
中图分类号
O59 [应用物理学];
学科分类号
摘要
Clean, ordered GaN(0001)-(1 X 1) surfaces are prepared by sputtering with nitrogen ions followed by annealing in ultrahigh vaccum. The surfaces are subsequently exposed at room temperature to O-2 and the chemisorption process studied using Auger, valence and core-level photoemission and electron energy loss spectroscopies, low-energy electron diffraction, and work function measurements. Saturation occurs at a coverage of Theta(ox)=0.4 ML and is accompanied by the removal of surface slates near the band edges. The continued presence of a clear (1 x 1) diffraction pattern, together with other data, indicates a well-defined adsorption site, but the relative importance of Ga-O and N-O bonding remains undetermined. The realization that surface states exist near the valence-band maximum has led to a more accurate determination of the surface Fermi-level pinning position, and of dependent quantities, than given previously. Clean-surface data are also compared with those for surfaces prepared by in situ deposition of Ga metal followed by thermal desorption. No significant differences are seen, which suggests that nitrogen-ion sputtering and annealing is suitable for preparing clean, ordered GaN(0001)-(1 X 1) surfaces. The results for O chemisorption on atomically clean surfaces have been applied to evaluating the passivation of surfaces prepared by ex situ wet-chemical cleaning. The hand bending is found to be similar to 0.5 eV less than on atomically clean surfaces.
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页码:1190 / 1200
页数:11
相关论文
共 67 条
[1]   CHEMISORPTION OF OXYGEN AT CLEAVED GAAS(110) SURFACES - PHOTON STIMULATION AND CHEMISORPTION STATES [J].
BARTELS, F ;
MONCH, W .
SURFACE SCIENCE, 1984, 143 (2-3) :315-341
[2]   OXYGEN AND HYDROGEN ADSORPTION ON GAAS(110) [J].
BARTELS, F ;
SURKAMP, L ;
CLEMENS, HJ ;
MONCH, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03) :756-762
[3]  
BARTELS F, 1987, UNPUB
[4]   OXIDATION BEHAVIOR OF ALUMINUM NITRIDE [J].
BELLOSI, A ;
LANDI, E ;
TAMPIERI, A .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (03) :565-572
[5]   STUDY OF CORROSION-PROTECTED AIN SAMPLES BY X-RAY PHOTOELECTRON-SPECTROSCOPY AND DIFFUSE-REFLECTANCE IR FOURIER-TRANSFORM SPECTROSCOPY [J].
BENITEZ, JJ ;
CENTENO, MA ;
CAPITAN, MJ ;
ODRIOZOLA, JA ;
VIOT, B ;
VERDIER, P ;
LAURENT, Y .
JOURNAL OF MATERIALS CHEMISTRY, 1995, 5 (08) :1223-1226
[6]   OBSERVATION OF A NEGATIVE ELECTRON-AFFINITY FOR HETEROEPITAXIAL ALN ON ALPHA(6H)-SIC(0001) [J].
BENJAMIN, MC ;
WANG, C ;
DAVIS, RF ;
NEMANICH, RJ .
APPLIED PHYSICS LETTERS, 1994, 64 (24) :3288-3290
[7]   ADSORPTION OF ATOMIC NITROGEN AT GAAS(110) SURFACES [J].
BERGER, A ;
TROOST, D ;
MONCH, W .
VACUUM, 1990, 41 (1-3) :669-671
[8]   GROWTH OF THIN NI FILMS ON GAN(0001)-(1X1) [J].
BERMUDEZ, VM ;
KAPLAN, R ;
KHAN, MA ;
KUZNIA, JN .
PHYSICAL REVIEW B, 1993, 48 (04) :2436-2444
[9]   CHARACTERIZATION OF A ZR M-XI (HV=151.6 EV) SOURCE FOR SOFT-X-RAY PHOTOEMISSION SPECTROSCOPY [J].
BERMUDEZ, VM .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1995, 73 (03) :249-259
[10]  
BERMUDEZ VM, 1996, J APPL PHYS, V79, P101