Advanced in situ metrology for x-ray beam shaping with super precision

被引：43
|
作者：
Wang, Hongchang [1 ]
Sutter, John [1 ]
Sawhney, Kawal [1 ]
机构：
[1] Diamond Light Source, Didcot OX11 0DE, Oxon, England
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 02期
关键词：
MIRRORS; OPTICS; INTERFEROMETER;
D O I：
10.1364/OE.23.001605
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report a novel method for in situ metrology of an X-ray bimorph mirror by using the speckle scanning technique. Both the focusing beam and the "tophat" defocussed beam have been generated by optimizing the bimorph mirror in a single iteration. Importantly, we have demonstrated that the angular sensitivity for measuring the slope error of an optical surface can reach accuracy in the range of two nanoradians. When compared with conventional ex-situ metrology techniques, the method enables a substantial increase of around two orders of magnitude in the angular sensitivity and opens the way to a previously inaccessible region of slope error measurement. Such a super precision metrology technique will be beneficial for both the manufacture of polished mirrors and the optimization of beam shaping. (C) 2015 Optical Society of America
引用
收藏
页码：1605 / 1614
页数：10
相关论文
共 50 条
  • [31] Adaptive multi-beam X-ray ptychography
    Astrand, Mattias
    Kahnt, Maik
    Johansson, Ulf
    Vogt, Ulrich
    OPTICS EXPRESS, 2024, 32 (13): : 22771 - 22780
  • [32] Single-Grating TalbotI maging for Wavefront Sensing and X-Ray Metrology
    Grizolli, Walen
    Shi, Xianbo
    Kolodziej, Tomasz
    Shvyd'ko, Yuri
    Assoufid, Lahsen
    ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VII, 2017, 10385
  • [33] High-quality quasi-parallel X-ray beam obtained by a parabolic monocapillary X-ray lens with a square beam stop
    Zhou, Peng
    Cui, Jingduo
    Du, Zelin
    Zhang, Tao
    Liu, Zhiguo
    JOURNAL OF X-RAY SCIENCE AND TECHNOLOGY, 2022, 30 (02) : 261 - 273
  • [34] Advances in X-ray optics: From metrology characterization to wavefront sensing-based optimization of active optics
    Cocco, Daniele
    Idir, Mourad
    Morton, Daniel
    Raimondi, Lorenzo
    Zangrando, Marco
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2018, 907 : 105 - 115
  • [35] Grating-based at-wavelength metrology of hard x-ray reflective optics
    Berujon, Sebastien
    Ziegler, Eric
    OPTICS LETTERS, 2012, 37 (21) : 4464 - 4466
  • [36] Focusing of soft X-ray radiation and characterization of the beam profile enabling X-ray emission spectrometry at nanolayered specimens
    Unterumsberger, R.
    Mueller, M.
    Beckhoff, B.
    Hoenicke, P.
    Pollakowski, B.
    Bjeoumikhova, S.
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2012, 78 : 37 - 41
  • [37] Focusing systems for the generation of X-ray micro beam: An overview
    Guilherme, A.
    Buzanich, G.
    Carvalho, M. L.
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2012, 77 : 1 - 8
  • [38] Spectral structure of a polycapillary lens shaped X-ray beam
    Gogolev, A. S.
    Filatov, N. A.
    Uglov, S. R.
    Hampai, D.
    Dabagov, S. B.
    JOURNAL OF INSTRUMENTATION, 2018, 13
  • [39] X-ray mirror prototype based on cold shaping of thin glass foils
    Basso, Stefano
    Civitani, Marta
    Ghigo, Mauro
    Holyszko, Joanna
    Pareschi, Giovanni
    Salmaso, Bianca
    Vecchi, Gabriele
    Burwitz, Vadim
    Pelliciari, Carlo
    Hartner, Gisela D.
    Breunig, Elias
    OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY VIII, 2017, 10399
  • [40] Development of the new Long Trace Profilometer at LCLS for bendable X-ray mirror metrology
    Ng, M. L.
    Nicolas, J.
    Spiga, D.
    Hardin, C. L.
    Morton, D. S.
    Cocco, D.
    ADAPTIVE X-RAY OPTICS V, 2018, 10761
12345