Advanced in situ metrology for x-ray beam shaping with super precision

被引：43
|
作者：
Wang, Hongchang [1 ]
Sutter, John [1 ]
Sawhney, Kawal [1 ]
机构：
[1] Diamond Light Source, Didcot OX11 0DE, Oxon, England
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 02期
关键词：
MIRRORS; OPTICS; INTERFEROMETER;
D O I：
10.1364/OE.23.001605
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report a novel method for in situ metrology of an X-ray bimorph mirror by using the speckle scanning technique. Both the focusing beam and the "tophat" defocussed beam have been generated by optimizing the bimorph mirror in a single iteration. Importantly, we have demonstrated that the angular sensitivity for measuring the slope error of an optical surface can reach accuracy in the range of two nanoradians. When compared with conventional ex-situ metrology techniques, the method enables a substantial increase of around two orders of magnitude in the angular sensitivity and opens the way to a previously inaccessible region of slope error measurement. Such a super precision metrology technique will be beneficial for both the manufacture of polished mirrors and the optimization of beam shaping. (C) 2015 Optical Society of America
引用
收藏
页码：1605 / 1614
页数：10
相关论文
共 50 条
  • [11] High-Precision X-Ray Polarimetry
    Marx, B.
    Schulze, K. S.
    Uschmann, I.
    Kaempfer, T.
    Loetzsch, R.
    Wehrhan, O.
    Wagner, W.
    Detlefs, C.
    Roth, T.
    Haertwig, J.
    Foerster, E.
    Stoehlker, T.
    Paulus, G. G.
    PHYSICAL REVIEW LETTERS, 2013, 110 (25)
  • [12] Speckle-based portable device for in-situ metrology of X-ray mirrors at Diamond Light Source
    Wang, Hongchang
    Kashyap, Yogesh
    Zhou, Tunhe
    Sawhney, Kawal
    ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VII, 2017, 10385
  • [13] Estimation of Observation Possibility of the X-ray Interferometer with an X-Ray Beam-splitter
    Kitamoto, S.
    Ogawa, S.
    Komatsu, T.
    Umezu, R.
    Sugimoto, J.
    Suzuki, H.
    Nambu, D.
    Tsumura, H.
    Seta, H.
    Hoshino, A.
    Aikawa, S.
    Niizuma, Y.
    SPACE TELESCOPES AND INSTRUMENTATION 2014: ULTRAVIOLET TO GAMMA RAY, 2014, 9144
  • [14] Energy dependence of x-ray beam size produced by polycapillary x-ray optics
    Das, Anusheela
    Heirwegh, Chris M.
    Gao, Ning
    Elam, William T.
    Wade, Lawrence A.
    Clark III, Benton C.
    Hurowitz, Joel A.
    Vanbommel, Scott J.
    Jones, Michael W. M.
    Allwood, Abigail C.
    X-RAY SPECTROMETRY, 2025, 54 (02) : 203 - 213
  • [15] Feasibility of X-ray beam nanofocusing with compound refractive lenses
    Kohn, V. G.
    Folomeshkin, M. S.
    JOURNAL OF SYNCHROTRON RADIATION, 2021, 28 : 419 - 428
  • [16] X-ray wavefront sensing and optics metrology using a microfocus x-ray grating interferometer with electromagnetic phase stepping
    Zhao, Shuai
    Yang, Yu
    Liu, Huiting
    Huang, Ziwen
    Zhang, Lei
    Wang, Qiuping
    Wang, Keyi
    APPLIED PHYSICS LETTERS, 2022, 120 (18)
  • [17] At-wavelength Metrology of X-ray Optics at Diamond Light Source
    Wang, Hongchang
    Berujon, Sebastien
    Sutter, John
    Alcock, Simon G.
    Sawhney, Kawal
    ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS V, 2014, 9206
  • [18] Absolute metrology method of the x-ray mirror with speckle scanning technique
    Xue, Lian
    Li, Zhongliang
    Zhou, Tunhe
    Dong, Xiaohao
    Luo, Hongxin
    Wang, Hongchang
    Sawhney, Kawal
    Wang, Jie
    APPLIED OPTICS, 2019, 58 (31) : 8658 - 8664
  • [19] Tunable kinoform x-ray beam splitter
    Lebugle, M.
    Seniutinas, G.
    Marschall, F.
    Guzenko, V. A.
    Grolimund, D.
    David, C.
    OPTICS LETTERS, 2017, 42 (21) : 4327 - 4330
  • [20] X-ray beam compression by tapered waveguides
    Chen, H. -Y.
    Hoffmann, S.
    Salditt, T.
    APPLIED PHYSICS LETTERS, 2015, 106 (19)
12345