Highly-stable (< 3% fluctuation) Ag-based Threshold Switch with Extreme-low OFF Current of 0.1 pA, Extreme-high Selectivity of 109 and High Endurance of 109 Cycles

被引:19
作者
Banerjee, Writam [1 ]
Karpov, Ilya, V [2 ]
Agrawal, Ashish [2 ]
Kim, Seonghun [3 ]
Lee, Seungwoo [1 ]
Lee, Sangmin [1 ]
Lee, Donghwa [3 ]
Hwang, Hyunsang [1 ]
机构
[1] Pohang Univ Sci & Technol POSTECH, Ctr Single Atom Based Semicond Device, Dept Mat Sci & Engn, Pohang 790784, South Korea
[2] Intel Corp, Components Res, Hillsboro, OR 97124 USA
[3] Pohang Univ Sci & Technol POSTECH, Computat Nanomat Design Lab, Dept Mat Sci & Engn, Pohang 790784, South Korea
来源
2020 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2020年
关键词
D O I
10.1109/IEDM13553.2020.9371960
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate driving parameters to control the hybrid-filament (HF) in Ag-based threshold switching (TS) devices. To achieve statistically improved TS behavior, we engineer the nucleation energy barrier, shape of HF and steric repulsion force during TS-operation. Finally, we demonstrate TS with extremely low OFF current (0.1 pA), extremely high selectivity (> 10(9)) with stable threshold voltage (< 3% fluctuation), high endurance (> 10(9)) with stable steep subthreshold slope similar to 1 mV/dec, and high device-yield in Ag based devices.
引用
收藏
页数:4
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