Ion Energy Spectrum Control in Modified Cross-Beam Pulsed Laser Deposition Method

被引：7

作者：

Khaydukov, E. V. ^{[1
]}

Novodvorsky, O. A. ^{[1
]}

Rocheva, V. V. ^{[1
]}

Lotin, A. A. ^{[1
]}

Zuev, D. A. ^{[1
]}

Khramova, O. D. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Laser & Informat Technol, Shatura 140700, Moscow Oblast, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2011年 / 37卷 / 01期

基金：

俄罗斯基础研究基金会;

关键词：

EROSION PLUME; ABLATION; VACUUM; FILMS; PROBE;

D O I：

10.1134/S1063785011010226

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The time-of-flight curves of the ion current to a probe in a plasma beam formed by crossing plumes from two laser-ablated silicon targets have been measured using the Langmuir probe technique. It is established for the first time that the ion energy spectrum of the plasma beam formed by the two laser erosion plumes and oriented in the direction of the bisector of the angle between the initial plumes can be modified by changing the angle between them (i.e., between the erosion plume). A modified cross-beam pulsed laser deposition method is proposed, which allows the energies of deposited particles to be controlled in a broad range.

引用

页码：69 / 71

页数：3

共 50 条

[41] GaN epitaxial growth using RF pulsed laser deposition (PLD) method with molten Ga target
Suzuki, J
Nakamura, A
Mizuno, K
Hosomi, T
Maki, T
Kobayashi, T
PROCEEDINGS OF THE INTERNATIONAL WORKSHOP ON NITRIDE SEMICONDUCTORS, 2000, 1 : 259 - 262
[42] Investigation of the structure and electrical properties of strontium titanate thin films growth by pulsed laser deposition method
Dehshali, Mabuobeh Babaee
Mahdavi, Seyed Mohammad
Tahmasebi, Nemat
JOURNAL OF CERAMIC PROCESSING RESEARCH, 2016, 17 (01): : 26 - 29
[43] Diamond-like phase formation in an amorphous carbon films prepared by periodic pulsed laser deposition and laser irradiation method
Eskusson, Jaanus
Jaaniso, Raivo
Lust, Enn
APPLIED SURFACE SCIENCE, 2009, 255 (15) : 7104 - 7108
[44] Fabrication of crystalline Bragg reflectors for high power and integrated optical applications by multi-beam Pulsed Laser Deposition
Sloyan, Katherine A.
May-Smith, Timothy C.
Zervas, Michalis
Eason, Robert W.
2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2012,
[45] Stoichiometry control in Cu2ZnSnS4 thin films grown by pulsed laser deposition
Beres, M.
Yu, K. M.
Syzdek, J.
Mao, S. S.
MATERIALS CHEMISTRY AND PHYSICS, 2018, 205 : 90 - 96
[46] An ultra-low energy (30-200 eV) ion-atomic beam source for ion-beam-assisted deposition in ultrahigh vacuum
Mach, Jindrich
Samoril, Tomas
Voborny, Stanislav
Kolibal, Miroslav
Zlamal, Jakub
Spousta, Jiri
Dittrichova, Libuse
Sikola, Tomas
REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (08)
[47] Properties of La and Nb-modified PZT thin films grown by radio frequency assisted pulsed laser deposition
Verardi, P
Craciun, F
Dinescu, M
Scarisoreanu, N
Moldovan, A
Purice, A
Galassi, C
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 118 (1-3): : 39 - 43
[48] Low-energy femtosecond pulsed laser deposition of cerium (IV) oxide thin films on silicon substrates
De Mesa, Joseph A.
Rillera, Angelo P.
Empizo, Melvin John F.
Sarukura, Nobuhiko
Sarmago, Roland, V
Garcia, Wilson O.
JOURNAL OF CRYSTAL GROWTH, 2021, 574 (574)
[49] Gas-assisted femtosecond pulsed laser machining: A high-throughput alternative to focused ion beam for creating large, high-resolution cross sections
May, Nicholas
Choi, Hongbin
Phoulady, Adrian
Amini, Shahram
Tavousi, Pouya
Shahbazmohamadi, Sina
PLOS ONE, 2023, 18 (05):
[50] Stoichiometry control of complex oxides by sequential pulsed-laser deposition from binary-oxide targets
Herklotz, A.
Doerr, K.
Ward, T. Z.
Eres, G.
Christen, H. M.
Biegalski, M. D.
APPLIED PHYSICS LETTERS, 2015, 106 (13)

← 1 2 3 4 5 →