Ion Energy Spectrum Control in Modified Cross-Beam Pulsed Laser Deposition Method

被引：7

作者：

Khaydukov, E. V. ^{[1
]}

Novodvorsky, O. A. ^{[1
]}

Rocheva, V. V. ^{[1
]}

Lotin, A. A. ^{[1
]}

Zuev, D. A. ^{[1
]}

Khramova, O. D. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Laser & Informat Technol, Shatura 140700, Moscow Oblast, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2011年 / 37卷 / 01期

基金：

俄罗斯基础研究基金会;

关键词：

EROSION PLUME; ABLATION; VACUUM; FILMS; PROBE;

D O I：

10.1134/S1063785011010226

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The time-of-flight curves of the ion current to a probe in a plasma beam formed by crossing plumes from two laser-ablated silicon targets have been measured using the Langmuir probe technique. It is established for the first time that the ion energy spectrum of the plasma beam formed by the two laser erosion plumes and oriented in the direction of the bisector of the angle between the initial plumes can be modified by changing the angle between them (i.e., between the erosion plume). A modified cross-beam pulsed laser deposition method is proposed, which allows the energies of deposited particles to be controlled in a broad range.

引用

页码：69 / 71

页数：3

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