Investigation of current-voltage characteristics of vertically stacked all-NbCN Josephson junctions

Current-voltage characteristics of vertically stacked all-NbCN Josephson junctions has been investigated with a purpose to use them as an element of integrated circuits; It has been shown that increases of microwave power in the junction definition process using electron cyclotron resonance (ECR) etching causes reduction of the junction quality parameter. From results of a measurement of current-voltage characteristics for an array composed of five-fold vertically stacked NbCN/MgO/NbCN junctions, it has been found that a very high uniformity in critical currents can be achieved. (C) 1998 Elsevier Science Ltd. All rights reserved.