Investigation of current-voltage characteristics of vertically stacked all-NbCN Josephson junctions

被引：0
|
作者：
Kikuchi, T [1 ]
Yamamori, H [1 ]
Shoji, A [1 ]
机构：
[1] Electrotech Lab, Ibaraki, Osaka 305, Japan
来源：
APPLIED SUPERCONDUCTIVITY | 1997年 / 5卷 / 7-12期
关键词：
D O I：
10.1016/S0964-1807(98)00058-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Current-voltage characteristics of vertically stacked all-NbCN Josephson junctions has been investigated with a purpose to use them as an element of integrated circuits; It has been shown that increases of microwave power in the junction definition process using electron cyclotron resonance (ECR) etching causes reduction of the junction quality parameter. From results of a measurement of current-voltage characteristics for an array composed of five-fold vertically stacked NbCN/MgO/NbCN junctions, it has been found that a very high uniformity in critical currents can be achieved. (C) 1998 Elsevier Science Ltd. All rights reserved.
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页码：393 / 398
页数：6
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