[1] Korea Inst Ind Technol KITECH, Micro Nano Proc Grp, Ansan 15588, South Korea
[2] Korea Inst Ind Technol KITECH, Surface Technol Grp, Incheon 21999, South Korea
[3] Hanyang Univ, Dept Mech Engn, Seoul 04763, South Korea
[4] SUNY Stony Brook, Dept Mech Engn, Stony Brook, NY 11794 USA