Deposition of CeO2 buffer layers for YBCO coated conductors on biaxially textured ni substrates by MOCVD technique

被引:4
作者
Kim, HJ [1 ]
Joo, J
Ji, BK
Jun, BH
Jung, CH
Park, SD
Park, HW
Hong, GW
Kim, CJ
机构
[1] Sungkyunkwan Univ, Dept Adv Mat Engn, Seoul, South Korea
[2] Korea Atom Energy Res Inst, Supercond Res Lab, Seoul, South Korea
关键词
(200) texture; AFM roughness; CeO2 buffer layer; metal-organic chemical vapor deposition (MOCVD) method;
D O I
10.1109/TASC.2003.811846
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
CeO2 buffer layers for YBa2Cu3O7(YBCO) coated conductors were deposited on biaxially textured Ni substrates by metalorganic chemical vapor deposition (MOCVD) method. The variables were the oxygen partial pressure (P-O2), deposition temperature and time: The (200) texture of CeO2 was formed at T = 500degreesC-520degreesC, t = 3-15 min and PO2 = 2.30 torr, while the (111) and (200) texture were competitively formed at other condition. The surface roughness of CeO2 films was as good as 5-15 nm up to 500 degreesC, while it rapidly increased as a result of grain growth of the CeO2 at T greater than or equal to 520 degreesC. The surface roughness of the CeO2 films also increased as the deposition time increased. The growth rate of the CeO2 films at T = 520 degreesC and P-O2 = 2.30 torr was 200 nm/min, which is much higher than those prepared by other physical deposition methods.
引用
收藏
页码:2555 / 2558
页数:4
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