Design of Low Cost Gas Sensor Based on SrTiO3 and BaTiO3 Films

被引：32

作者：

Hodak, Satreerat K. ^{[1
,4
]}

Supasai, Thidarat ^{[1
]}

Wisitsoraat, Anurat ^{[2
]}

Hodak, Jose H. ^{[3
]}

机构：

[1] Chulalongkorn Univ, Fac Sci, Dept Phys, Bangkok 10330, Thailand

[2] Natl Elect & Comp Technol Ctr NECTEC, Nanoelect & MEMS Lab, Pathum Thani 12120, Thailand

[3] Mahidol Univ, Fac Sci, Dept Phys, Bangkok 10400, Thailand

[4] Chulalongkorn Univ, Ctr Innovat Nanotechnol, Bangkok 10330, Thailand

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2010年 / 10卷 / 11期

关键词：

SrTiO3/BaTiO3; Gas Sensor; Sol-Gel Method; THIN-FILMS;

D O I：

10.1166/jnn.2010.2800

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We have prepared SrTiO3/BaTiO3 multilayer film on alumina substrates by a sol-gel technique and investigated their response for sensing ethanol vapor. The surface morphology of the films were characterized by atomic force microscope (AFM) showing that the grain size of the films increase up to 40 nm as the annealing temperature increased to 1000 degrees C. The ethanol sensors based on SrTiO3/BaTiO3 thin films were fabricated by applying interdigitated gold electrodes by sputtering technique. The ethanol sensing characteristics of SrTiO3/BaTiO3 thin films were quantified by the change in resistance of the sensors when they were exposed to ethanol. The optimum operating tempearature of these sensors was found to be 350 degrees C. In addition, the film annealed at 1000 degrees C exhibited p-type gas sensing behavior with the best sensitivity of 30-100 for low ethanol concentration in the range of 100-1000 ppm.

引用

页码：7236 / 7238

页数：3

共 6 条

[1] Ag dopedWO3-based powder sensor for the detection of NO gas in air [J].

Chen, L ;

Tsang, SC .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 89 (1-2) :68-75

[2] Perovskite oxides for semiconductor-based gas sensors [J].

Fergus, Jeffrey W. .

SENSORS AND ACTUATORS B-CHEMICAL, 2007, 123 (02) :1169-1179

[3] Semiconducting BaTiO3-CuO mixed oxide thin films for CO2 detection [J].

Herran, J. ;

Ga Mandayo, G. ;

Castano, E. .

THIN SOLID FILMS, 2009, 517 (22) :6192-6197

[4] A low temperature nano-structured SrTiO3 thick film oxygen gas sensor [J].

Hu, Y ;

Tan, OK ;

Cao, W ;

Zhu, W .

CERAMICS INTERNATIONAL, 2004, 30 (07) :1819-1822

[5] Characterization of n-type and p-type semiconductor gas sensors based on NiOx doped TiO2 thin films [J].

Wisitsmat, A. ;

Tuantranont, A. ;

Comini, E. ;

Sberveglieri, G. ;

Modarski, W. .

THIN SOLID FILMS, 2009, 517 (08) :2775-2780

[6] Ion-assisted e-beam evaporated gas sensor for environmental monitoring [J].

Wisitsoraat, A ;

Tuantranont, A ;

Patthanasettakul, V ;

Lomas, T ;

Chindaudom, P .

SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2005, 6 (3-4) :261-265

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