Experimental and theoretical studies of the direct-current breakdown voltage in argon at micrometer separations

被引:34
作者
Klas, M. [1 ]
Matejcik, S. [1 ]
Radjenovic, B. [2 ]
Radmilovic-Radjenovic, M. [2 ]
机构
[1] Comenius Univ, Dept Expt Phys, Bratislava 84248, Slovakia
[2] Univ Belgrade, Inst Phys, Belgrade 11080, Serbia
关键词
EMISSION COEFFICIENT; ELECTRICAL BREAKDOWN; PLASMA; SIMULATION; MICROPLASMAS; PARTICLE; FIELD; FREQUENCY; DISCHARGE; AIR;
D O I
10.1088/0031-8949/83/04/045503
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this paper, the dc breakdown in argon has been measured in the discharge system consisting of two parallel planar Cu electrodes at separations from 20 to 500 mu m varying the pressure from 4.5 to 690 torr. The measured breakdown voltage curves were systematically analyzed and a corresponding scaling law was suggested. The estimation of the secondary emission coefficient gamma as a function of the reduced electric field was based on experimental data and simple theoretical studies. Additionally, particle-in-cell/Monte Carlo collision simulations were performed to understand in more detail the processes involved in the dc discharge breakdown. Good agreement was found between experimental and simulation results.
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页数:6
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