Thick-film resistors on various substrates as sensing elements for strain-gauge applications

被引：30

作者：

Hrovat, M

Belavic, D

Bencan, A

Bernard, J

Holc, J

Cilensek, J

Smetana, W

Homolka, H

Reicher, R

Golonka, L

Dziedzic, A

Kita, J

机构：

[1] Jozef Stefan Inst, SI-1000 Ljubljana, Slovenia

[2] HIPOT, R&D, DOO, SI-8310 Sentjernej, Slovenia

[3] Vienna Univ Technol, A-1040 Vienna, Austria

[4] Wroclaw Univ Technol, PL-50370 Wroclaw, Poland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 107卷 / 03期

关键词：

thick-film resistor; gauge factor; microstructure; electrical properties;

D O I：

10.1016/j.sna.2003.07.003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The characteristics of 10 kohm/sq. thick-film resistors (2041, Du Pont and 2341-B, ESL) fired on tetragonal ZrO2, low-temperature cofired ceramic (LTCC) and dielectric-on-steel substrates were investigated with the aim of determining the compatibility of these resistor materials, which were developed for firing on Al2O3, with other substrates. Possible interactions between the thick-film resistors and the substrates were investigated. Sheet resistivities, temperature coefficients of resistivity, noise indices and gauge factors (GFs) were measured. The results indicate that the 2041 and 3414-B thick-film resistors could be used on the evaluated substrates if an allowance is made for the increased temperature coefficient of resistivities (TCRs) of both resistor materials on the zirconia substrates and for the increased sheet resistivities and TCRs of the 3414-B resistors on the LTCC substrates. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：261 / 272

页数：12

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