Engineered solder-directed self-assembly across length scales

被引:0
作者
Knuesel, Robert [1 ]
Bose, Shameek [1 ]
Zheng, Wei [1 ]
Jacobs, Heiko O. [1 ]
机构
[1] Univ Minnesota, Dept Elect & Comp Engn, 200 Union St SE, Minneapolis, MN 55455 USA
来源
MATERIALS, PROCESSES, INTEGRATION AND RELIABILITY IN ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS | 2007年 / 990卷
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D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report on recent progress in the directed self-assembly of discrete inorganic semiconductor device components. Different from prior research, the goal is to enable the integration of increasingly small dies while supporting unique-angle orientation and contact pad registration. The process is based on the reduction of surface free energy between liquid solder coated areas on the substrate and metal-coated binding sites on the semiconductor dies. Recent advances include flip-chip assembly with unique angular orientation accomplished using ''two-element" docking sites that contain pedestals that act as chaperones for the solder directed assembly to take place. The scale reduction to 20 pm sized components involves the use of a liquid-liquid interface to concentrate component delivery and speed up the self-assembly process to prevent oxidative dissolution of the solder sites prior to completion.
引用
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页码:313 / 318
页数:6
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