Correlation between atomic composition and gas sensing properties in tungsten-iron oxide thin films

被引:15
作者
Comini, E.
Pandolfi, L.
Kaciulis, S.
Faglia, G.
Sberveglieri, G.
机构
[1] Univ Brescia, INFM, CNR, SENSOR, I-25133 Brescia, Italy
[2] CNR, ISMN, I-00016 Monterotondo, Italy
关键词
depth profile; metal oxide; XPS; WO3; gas sensors;
D O I
10.1016/j.snb.2007.07.004
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Mixed tungsten and iron oxide thin films were prepared with reactive RF sputtering. The electrical response of thin films of W-Fe oxides toward CO, NO2, ozone and ethanol was investigated. Moreover, XPS technique was employed to study the chemical composition of the samples' surfaces and the depth profile through the whole thickness of the films. The oxidation states of W and Fe were determined from the photoelectron spectra. Iron addition always increases the response towards ozone, carbon monoxide and ethanol. For nitrogen dioxide, the introduction of iron concentrations lower than 10% produce an enhancement in the response. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:22 / 28
页数:7
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