Near infra-red Mueller matrix imaging system and application to retardance imaging of strain

被引：22
作者：
Aas, Lars Martin Sandvik [1 ]
Ellingsen, Pal Gunnar [1 ]
Kildemo, Morten [1 ]
机构：
[1] Norwegian Univ Sci & Technol, Dept Phys, N-7491 Trondheim, Norway
来源：
THIN SOLID FILMS | 2011年 / 519卷 / 09期
关键词：
Mueller matrix; Imaging; Strain imaging; Polarimetry; Ellipsometry; Silicon wafer; DECOMPOSITION; ELLIPSOMETER; POLARIMETRY; MODULATORS; RETARDERS;
D O I：
10.1016/j.tsf.2010.12.093
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report on the design and performance of a near infra-red Mueller matrix imaging ellipsometer, and apply the instrument to retardance imaging of strain in near infra-red transparent solids. Particularly, we show that the instrument can be used to investigate complex strain domains in multi-crystalline silicon wafers. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：2737 / 2741
页数：5
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