Near infra-red Mueller matrix imaging system and application to retardance imaging of strain

被引：22

作者：

Aas, Lars Martin Sandvik ^{[1
]}

Ellingsen, Pal Gunnar ^{[1
]}

Kildemo, Morten ^{[1
]}

机构：

[1] Norwegian Univ Sci & Technol, Dept Phys, N-7491 Trondheim, Norway

来源：

THIN SOLID FILMS | 2011年 / 519卷 / 09期

关键词：

Mueller matrix; Imaging; Strain imaging; Polarimetry; Ellipsometry; Silicon wafer; DECOMPOSITION; ELLIPSOMETER; POLARIMETRY; MODULATORS; RETARDERS;

D O I：

10.1016/j.tsf.2010.12.093

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on the design and performance of a near infra-red Mueller matrix imaging ellipsometer, and apply the instrument to retardance imaging of strain in near infra-red transparent solids. Particularly, we show that the instrument can be used to investigate complex strain domains in multi-crystalline silicon wafers. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：2737 / 2741

页数：5

共 26 条

[1] Dynamic response of a fast near infra-red Mueller matrix ellipsometer [J].

Aas, Lars M. S. ;

Ellingsen, Pal G. ;

Kildemo, Morten ;

Lindgren, Mikael .

JOURNAL OF MODERN OPTICS, 2010, 57 (17) :1603-1610

[2] Mueller matrix imaging for cancer detection [J].

Baldwin, AM ;

Chung, JR ;

Baba, JS ;

Spiegelman, CH ;

Amoss, MS ;

Coté, GL .

PROCEEDINGS OF THE 25TH ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, VOLS 1-4: A NEW BEGINNING FOR HUMAN HEALTH, 2003, 25 :1027-1030

[3]

BRUSH DO, 1975, BUCKLING BARS PLATES

[4] Double-pass imaging polarimetry in the human eye [J].

Bueno, JM ;

Artal, P .

OPTICS LETTERS, 1999, 24 (01) :64-66

[5] Polarimetry using liquid-crystal variable retarders: theory and calibration [J].

Bueno, JM .

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2000, 2 (03) :216-222

[6] Development and use of a novel automated Mueller matrix polarization imaging system for In-vivo imaging of lesions [J].

Chung, JR ;

Baba, JS ;

deLaughter, AH ;

Coté, GL .

OPTICAL BIOPSY IV, 2002, 4613 :111-117

[7]

Cloude S. R., 1989, P SOC PHOTOOPT INSTR, V1166, P177, DOI DOI 10.1117/12.962889

[8] General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller-matrix ellipsometers [J].

Compain, E ;

Poirier, S ;

Drevillon, B .

APPLIED OPTICS, 1999, 38 (16) :3490-3502

[9] Ferroelectric retarders as an alternative to piezoelastic modulators for use in solar Stokes vector polarimetry [J].

Gandorfer, AM .

OPTICAL ENGINEERING, 1999, 38 (08) :1402-1408

[10] Spectroscopic Mueller polarimeter based on liquid crystal devices [J].

Garcia-Caurel, E ;

De Martino, A ;

Drévillon, B .

THIN SOLID FILMS, 2004, 455 :120-123

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